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Thermal and mechanical analysis of micromachined gas sensors

J Puigcorb, D Vogel, B Michel, A Vil, I Gr cia, C Can, J R Morante
2003 Journal of Micromechanics and Microengineering  
In this paper, we present a complete thermomechanical study of a micromachined gas sensor substrate.  ...  Their good agreement validates the model, and allows us to consider the adaptability of this design as a micromachined substrate for integrated gas sensors.  ...  In this paper, we present a thermomechanical study of a micromechanized gas sensor.  ... 
doi:10.1088/0960-1317/13/5/304 fatcat:m5h2beskibbwleeaqhugr5idem

Editorial for the Special Issue "Selected Papers from the ISTEGIM'19—Thermal Effects in Gas Flow in Microscale"

Lucien Baldas, Jürgen J. Brandner, Gian Luca Morini
2020 Micromachines  
[9] developed a one-dimensional numerical model, based on the discretization of the ideal regenerator thermal equations, to study the thermal interaction between the working gas and the metallic porous  ...  [8] used a reduced order numerical model based on a porous medium approximation for the microchannels, to analyze flow maldistribution and pressure losses for two different perturbators: wire-net and  ... 
doi:10.3390/mi11090879 pmid:32967349 fatcat:wqo7gnxd5jfzles7jru35i7rvq

A review of micromachined thermal accelerometers

Rahul Mukherjee, Joydeep Basu, Pradip Mandal, Prasanta Kumar Guha
2017 Journal of Micromechanics and Microengineering  
This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling,  ...  Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival  ...  However, it increased proportionally to the square of gas pressure to a value of 138mV/g at 25 bar.  ... 
doi:10.1088/1361-6439/aa964d fatcat:vbcpwfck2zae7haapwpwbq2idi

Micromachined Flow Sensors in Biomedical Applications

Sergio Silvestri, Emiliano Schena
2012 Micromachines  
This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others.  ...  In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy  ...  Acknowledgments This work has been carried out under the financial support of Regione Lazio in the framework of the ITINERIS2 project (CUP code F87G10000120009).  ... 
doi:10.3390/mi3020225 fatcat:3r3kd5jgtjf5peo4jiwmrxe5ne

A Si/Glass Bulk-Micromachined Cryogenic Heat Exchanger for High Heat Loads: Fabrication, Test, and Application Results

Weibin Zhu, Michael J. White, Gregory F. Nellis, Sanford A. Klein, Yogesh B. Gianchandani
2010 Journal of microelectromechanical systems  
This paper reports on a micromachined Si/glass stack recuperative heat exchanger with in situ temperature sensors.  ...  Numerous high-conductivity silicon plates with integrated platinum resistance temperature detectors (Pt RTDs) are stacked, alternating with low-conductivity Pyrex spacers.  ...  Hoch for participating in the design and modeling of the heat exchanger.  ... 
doi:10.1109/jmems.2009.2034322 pmid:20490284 pmcid:PMC2871702 fatcat:xr3ap2okrrepppjtl2ianpmwh4

Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

M. Dijkstra, M.J. de Boer, J.W. Berenschot, T.S.J. Lammerink, R.J. Wiegerink, M. Elwenspoek
2007 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)  
A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface.  ...  The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.  ...  EXPERIMENTS Measurements were performed using a pressure driven flow setup as indicated in figure 7 . DI water was forced through the microchannel by applying a pressure from a N 2 gas cylinder.  ... 
doi:10.1109/memsys.2007.4433031 fatcat:uar4xafhojedxchnntojmel4zi

Novel thermal method for determining properties of compressed natural gas

Stephan HEINRICH, Markus HIEN, Thorsten KNITTEL, Josef MUGGLI
2019 Combustion Engines  
In this paper the fundamentals of the theoretical gas properties, the sensor operation and the first results on a gas test bench are presented.  ...  The article describes a new method for obtaining fuel properties, derived from the thermal properties of natural gas fuel mixtures.  ...  Sensor properties Typical sensor arrangenments for measuring the thermal properties of gases are micromachined membranes.  ... 
doi:10.19206/ce-2019-107 fatcat:apros4xmyvah7awajevraxkr3a

A perforated plate stacked Si/glass heat exchanger with in-situ temperature sensing for joule-thomson coolers

Weibin Zhu, Michael J. White, Gregory F. Nellis, Sanford A. Klein, Yogesh B. Gianchandani
2008 Micro Electro Mechanical Systems (MEMS), Proceedings of the IEEE International Conference on  
This paper reports a micromachined recuperative heat exchanger integrated with in-situ temperature sensors.  ...  In a preliminary J-T self-cooling test, the temperature at the expansion orifice dropped 13 K from the inlet temperature for an inlet pressure of 527 kPa (76 psia).  ...  Hoch for his contribution to design and modeling of this work. The work was funded in part by a grant from the US National Institutes of Health (R33 EB003349-05).  ... 
doi:10.1109/memsys.2008.4443788 fatcat:vt72zcnyxvfd7lyd7dht5mklxe

Real-Time Monitoring of the Temperature, Flow, and Pressure Inside High-Temperature Proton Exchange Membrane Fuel Cells

Chi-Yuan Lee, Fang-Bor Weng, Chun-Wei Chiu, Shubham-Manoj Nawale, Bo-Jui Lai
2022 Micromachines  
Appropriate materials and process parameters are used to protect the micro-sensor from failure or damage under long-term testing, and to conduct a real-time micro-monitor of the local temperature, flow  ...  In this study, micromachining technology is used to develop a three-in-one flexible micro-sensor that is resistant to a high-temperature electrochemical environment (120~200 °C).  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/mi13071040 pmid:35888857 pmcid:PMC9320490 fatcat:xjhfj2nesnecbhfxc24hxumu7i

High performance Pirani vacuum gauge

Jin‐Shown Shie, Bruce C. S. Chou, Yeong‐Maw Chen
1995 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  
rises with the reduction of gas pressure and therefore thermal conduction.  ...  The micromachined Pirani sensor used in the experiments has a suspended membrane that is supported by the nearly radiation-limited, thermally insulating beam leads crossing over a V-groove cavity.  ...  This project was supported by the National Science Council of the Republic of China under project Contract No. NSC-82-0404-E-009-127.  ... 
doi:10.1116/1.579623 fatcat:j3wyxgretbaubf434hhhduqxqi

Microfluidics-a review

P Gravesen, J Branebjerg, O S Jensen
1993 Journal of Micromechanics and Microengineering  
This review focuses on the fluidic behaviour of the various devices, such as valves, pumps and flow sensors, as well as the possibilities and pkfalls related to the modelling of these devices using simple  ...  Finally, a number of microfluidic systems are described and comments on future trends are given.  ...  Acknowledgments The authors would like to thank Mogens Laursen of References Terry S C, Jerman J H and Angell J B 1979 A gas  ... 
doi:10.1088/0960-1317/3/4/002 fatcat:xmgnezyv4rfwnl2czsufoghix4

A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling

Bruce C.S Chou, Yeong-Maw Chen, Mang Ou-Yang, Jin-Shown Shie
1996 Sensors and Actuators A-Physical  
A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed.  ...  It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables.  ...  Acknowledgements This study is supported by National Science Council of the Republic of China under project contract No. NSC-82-0404-E-009-127.  ... 
doi:10.1016/0924-4247(96)01158-2 fatcat:3jns5tf4ljhjli2nunyoezkteu

Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring

Mathieu Hautefeuille, Brendan O'Flynn, Frank H. Peters, Conor O'Mahony
2011 Micromachines  
thermal conductivity, and gas flow velocity sensors on a single silicon substrate.  ...  ;O'Mahony, Conor (2011) 'Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring'. Micromachines, 2 (44):410-430410.  ...  The evolution of thermal conductance G as a function of pressure is presented in Figure 11 and clearly demonstrates that the sensor is capable of measuring pressure in the 1-1,000 mbar range.  ... 
doi:10.3390/mi2040410 fatcat:olmfzvop5vdkfcjmntorasa7ye

A micromachined flow shear-stress sensor based on thermal transfer principles

Chang Liu, Jin-Biao Huang, Zhenjun Zhu, Fukang Jiang, S. Tung, Yu-Chong Tai, Chih-Ming Ho
1999 Journal of microelectromechanical systems  
Testing of the sensor has been conducted in a wind tunnel under three operation modes-constant current, constant voltage, and constant temperature.  ...  The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity.  ...  In [10] , a pressure sensor and flow sensor are integrated for measurements in turbulent gas flows. Thermal piles are used in [11] to detect temperature changes.  ... 
doi:10.1109/84.749408 fatcat:2xal362vjvbvxkyaniy7p2dwrq

A novel CMOS sensor for measuring thermal diffusivity of liquids

Yi-Ting Cheng, Chih-Wei Chang, Ya-Rui Chung, Jui-Hung Chien, Jin-Sun Kuo, Wei-Ting Chen, Ping-Hei Chen
2007 Sensors and Actuators A-Physical  
This study aims at designing and developing a CMOS sensor chip for measuring thermal diffusivity of liquids.  ...  The CMOS sensor chip is realized by VIS 0.5 m 2P3M CMOS process with maskless post-CMOS micromachinings.  ...  Acknowledgements The authors deeply appreciate Vanguard International Semiconductor Corporation (VIS) for the fabrication, and the NSC MEMS Research Center, Taipei, Taiwan for providing the equipment for post-micromachining  ... 
doi:10.1016/j.sna.2006.08.026 fatcat:rqw6d3rhpzarpjwetaxlu7fgqq
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