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Electromagnetic and small-signal modeling of an encapsulated RF-MEMS switch for D-band applications

Selin Tolunay Wipf, Alexander Göritz, Matthias Wietstruck, Christian Wipf, Bernd Tillack, Andreas Mai, Mehmet Kaynak
2017 International journal of microwave and wireless technologies  
Alternative to the EM model, a small-signal model of the fabricated WLE RF-MEMS switch is developed.  ...  The EM model of the WLE RF-MEMS switch is developed to estimate its RF performance. After the fabrication of the switch, the EM model is used to get accurate S-parameter simulation results.  ...  In order to model the on and off-state of the RF-MEMS switch accurately the contact capacitances of the fabricated RF-MEMS switch should be measured.  ... 
doi:10.1017/s1759078717000137 fatcat:buifocel7jftvafbpov3k2vzvy

Capacitive and Resistive RF-MEMS switches 2.5D & 3D Electromagnetic and Circuit Modelling

M. A. Llamas, E. Pausas, L. Pradell, D. Girbau, S. Aouba, C. Villeneuve, V. Puyal, P. Pons, R. Plana, S. Colpo, F. Giacomozzi
2009 2009 Spanish Conference on Electron Devices  
Capacitive RF-MEMS switches were fabricated with the LAAS-CNRS 6-mask RF-MEMS process in Toulouse, France, and resistive RF-MEMS switches were fabricated with the FBK-irst 8-mask RF-MEMS process in Trento  ...  this paper proposes different strategies for the electrical modelling of capacitive and resistive RF-MEMS switches which take into account the dependence of the electrical performance on the mechanical  ...  Fig. 1 (a) shows a photograph of the capacitive RF-MEMS switch to be modelled. It was fabricated with the LAAS-CNRS 6-mask RF-MEMS process [7] .  ... 
doi:10.1109/sced.2009.4800531 fatcat:ms7hj7vxrjf2dnkic6oyfb2h3q

Design of A Novel Bulk Micro-machined RF MEMS Switch

Hai-Xia Zhang, Yi-Long Hao, Zhi--Yong Xiao, Dong-Mei Luo, Nora Finch, James Marchetti, Dan Keating, Vatsa Narasimha
2002 International journal of nonlinear sciences and numerical simulation  
A RF MEMS capacitive switch fabricated using bulk silicon micro-machining is investigated in this paper. The switch includes a vertically movable dielectric integrated in the folded beam.  ...  Detailed discussions of the movable elements and the simulations of the switch are presented. The effect of the beam shape, the beam thickness, and the air gap were studied.  ...  Therefore, in our research we generated the 3D model of the RF MEMS switch using the fabrication process.  ... 
doi:10.1515/ijnsns.2002.3.3-4.369 fatcat:uzjqlkfbobcq7kdahzslmcy3ji

Hybrid connection of RF MEMS and SMT components in an impedance tuner

Mehmet Unlu, Kagan Topalli, Halil Ibrahim Atasoy, Simsek Demir, Ozlem Aydin Civi, Tayfun Akin
2010 AEU - International Journal of Electronics and Communications  
This paper presents a systematic construction of a model for a hybrid connected RF MEMS and SMT components in a reconfigurable impedance tuner.  ...  In the hybrid tuner, MEMS switches are actuated with DC bias signals, where SMT resistors de-couple RF from the DC lines.  ...  MEMS switch measurements The circuit model parameters of the fabricated MEMS switch are extracted from the S-parameter measurements.  ... 
doi:10.1016/j.aeue.2010.01.008 fatcat:sdlexbakdrhtbg2un55zsq3oiq

Low Temperature Superconducting RF MEMS Devices

S. S. Attar, R. R. Mansour
2013 IEEE transactions on applied superconductivity  
The design and fabrication of several Nb-based RF MEMS switches and varactors were introduced in this thesis.  ...  [9] designed and fabricated another RF MEMS air bridge. Fig. 2 .14 shows the SEM image of the switch.  ...  Appendix B Nb-Based Fabrication Process Step-by-step details of the fabrication process of the Nb-based RF circuit integrated with Au-based MEMS structures.  ... 
doi:10.1109/tasc.2012.2231896 fatcat:ulyizy22frazxfhreql3ik7eb4

Development of Broadband Low Actuation Voltage RF MEM Switches

S. C. Shen, D. Becher, Z. Fan, D. Caruth, Milton Feng
2002 Active and Passive Electronic Components  
The RF Model of the MEM switch was also established.  ...  The low voltage RF MEM switches will provide a solution for low voltage and highly linear switching methods for the next generation of broadband RF, microwave, and millimeter-wave circuits.  ...  FIGURE 4 A 4 generic equivalent circuit model of a shunt RF MEM switch for (a) on state and (b) off state. FIGURE 5 A 5 microscope picture of a fabricated cantilever switch.  ... 
doi:10.1080/08827510211282 fatcat:vk6z3g6tlzacnm3xwce435r5tq

MEM relay for reconfigurable RF circuits

R.E. Mihailovich, M. Kim, J.B. Hacker, E.A. Sovero, J. Studer, J.A. Higgins, J.F. DeNatale
2001 IEEE Microwave and Wireless Components Letters  
This relay provides excellent switching performance over a broad frequency band (insertion loss of 0.1 dB and isolation of 30 dB at 40 GHz), versatility in switch circuit configurations (microstrip and  ...  In addition, this MEM relay technology has demonstrated yields and lifetimes that are promising for RF circuit implementation.  ...  ACKNOWLEDGMENT The authors would like to thank Rockwell Collins for support in relay device development, Boeing for support of relay/MMIC integration demonstration, and DARPA for sponsorship of the application  ... 
doi:10.1109/7260.914300 fatcat:n4pwqm7y65fprfl2vhibt6vvv4

Frequency Scalable Model for MEMS Capacitive Shunt Switches at Millimeter-Wave Frequencies

V. Puyal, D. Dragomirescu, C. Villeneuve, Jinyu Ruan, P. Pons, R. Plana
2009 IEEE transactions on microwave theory and techniques  
This paper presents an approach to RF MEMS capacitive shunt switch design from K-band up to W-band, based on the scalability of the RF MEMS switch with frequency.  ...  The measurement results of the fabricated switches show an excellent agreement with simulations which allow to validate the MEMS model in the entire band from 20 GHz up to 94 GHz.  ...  Rumeau and J. Lattes for measurement and T. Beluch for Matlab assistance.  ... 
doi:10.1109/tmtt.2009.2032473 fatcat:t4icm2ywirbrbeecqaa6io25fi

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits [chapter]

Lluis Pradell, David Girbau, Miquel Ribó, Jasmina Casals-Terré, Antonio Lázaro, Adrián Contreras, Marco Antonio Llamas, Julio Heredia, Flavio Giacomozzi, Benno Margesin
2018 MEMS Sensors - Design and Application  
The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW  ...  Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation.  ...  for the fabrication of RF-MEMS.  ... 
doi:10.5772/intechopen.76445 fatcat:lwmjx3lpfvbjzf45mqxdc5mqea

A fabrication process based on structural layer formation using Au–Au thermocompression bonding for RF MEMS capacitive switches and their performance

Cagri Cetintepe, Ebru Sagiroglu Topalli, Simsek Demir, Ozlem Aydin Civi, Tayfun Akin
2014 International journal of microwave and wireless technologies  
of a sample RF MEMS switch design implemented with this process.  ...  Millimeter-wave measurements of the fabricated RF MEMS switches demonstrate satisfactory up-state performance with the worst-case return and insertion losses of 13.7 and 0.38 dB, respectively; but the  ...  fabricated RF MEMS switches.  ... 
doi:10.1017/s1759078714000968 fatcat:tsbjxqwnvffz7dlwq4u7galohm

Switchable wide tuning range bandstop filters for frequency-agile radios

Zhengzheng Wu, Yonghyun Shim, Mina Rais-Zadeh
2011 2011 International Electron Devices Meeting  
This paper reports on micromachined tunable bandstop filters that exhibit an octave frequency tuning range with high stopband rejection and low out-of-band loss.  ...  The fully re-configurable filters in this work are fabricated using a silicon-based integrated passive device technology and are the smallest-size bandstop filters reported in the low SHF range.  ...  Acknowledgement The authors would like to acknowledge the staff of the Lurie Nanofabrication Facility at the University of Michigan for their assistance with fabrication.  ... 
doi:10.1109/iedm.2011.6131592 fatcat:jwcaojeiqffbnn6urf2e3miyua

Characterization of an embedded RF-MEMS switch

M. Kaynak, K. E. Ehwald, R. Scholz, F. Korndorfer, C. Wipf, Y. M. Sun, B. Tillack, S. Zihir, Y. Gurbuz
2010 2010 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)  
The results proved the feasibility of using the FEM model in circuit simulations for the development of RF-MEMS switch embedded, single-chip multi-band RF ICs.  ...  An RF-MEMS capacitive switch for mm-wave integrated circuits, embedded in the BEOL of 0.25µm BiCMOS process, has been characterized.  ...  ACKNOWLEDGEMENT The authors thank to the team of the IHP pilot line for excellent support, S. Kurth and S.  ... 
doi:10.1109/smic.2010.5422816 fatcat:zvuepdlbpjg5bfcgengm2f7e3a

A High Isolation Series-Shunt RF MEMS Switch

Yuan-Wei Yu, Jian Zhu, Shi-Xing Jia, Yi Shi
2009 Sensors  
The agreement of the measured and modeled radio frequency (RF) performance demonstrates the validity of the electrical equivalent model.  ...  In order to shorten design period of the high isolation switch, a structure-based small-signal model for the 3-port ohmic MEMS switch is developed and parameters are extracted from the measured results  ...  Acknowledgements This work was supported by the Advanced Research Foundation and the National 863 Project (2008AA04Z306) of China. The authors would like to thank Dr.  ... 
doi:10.3390/s90604455 pmid:22408535 pmcid:PMC3291920 fatcat:fzm7i3jkcvbsrfc5ye5vmbm7hy

Integration of RF-MEMS switches with a band-reject reconfigurable ultra-wideband antenna on SiO2 substrate

N Sepulveda, D E Anagnostou, M T Chryssomallis, J L Ebel
2010 2010 IEEE Antennas and Propagation Society International Symposium  
#MacB-07-D-0016/0010, by the NSF Grant #HRD-0833112 and NSF/EPSCoR Grant #EPS-0903804.  ...  Response of the Reconfigurable UWB MEMS Antenna Fig. 1 .Fig 1 Simulated model of the band-reject UWB antenna showing the placement of the integrated RF-MEMS switches.  ...  Fig. 3 . 3 Photo of the fabricated antenna with integrated MEMS during measurements, showing the RF-probe (bottom) and DC bias pads (top).  ... 
doi:10.1109/aps.2010.5560968 fatcat:o4efyiek65ez5lt666vyjm3dua

Recent Advances in Flexible RF MEMS

Yingli Shi, Zhigang Shen
2022 Micromachines  
When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types  ...  In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies.  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/mi13071088 pmid:35888905 pmcid:PMC9315774 fatcat:ezsbs45ttfdfrllabuuqn5jlsy
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