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MOSAIC: Mask optimizing solution with process window aware inverse correction

Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan
2014 2014 51st ACM/EDAC/IEEE Design Automation Conference (DAC)  
In this paper, we consider simultaneously 1) the design target optimization under nominal process condition and 2) process window minimization with different process corners, and solve the mask optimization  ...  Inverse Lithography Technique (ILT) that solves the inverse problem of the imaging system becomes a promising solution for OPC.  ...  We propose new mask optimizing solutions considering design target and process window simultaneously.  ... 
doi:10.1109/dac.2014.6881379 fatcat:om3o4gqph5dndkwnpten3lcffa

Optical Proximity Correction (OPC) Under Immersion Lithography [chapter]

Ahmed Awad, Atsushi Takahashi, Chikaaki Kodaman
2018 Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology  
Consequently, complex mask solutions are outputted. Furthermore, this results in long computation time along with mask data volume explosion.  ...  Thereafter, the performance of a recently published fast OPC methodology-to generate highly manufactured mask solutions with acceptable pattern fidelity under process variations-is verified on the public  ...  Mask Optimization Solution with Process Window Aware Inverse Correction (MOSAIC) algorithm has been recently proposed as an ILT algorithm with exploiting variational EPE under each process corner.  ... 
doi:10.5772/intechopen.72699 fatcat:n23carvjdjeqbi63wdjbs36hwy

Integrating macromolecular X-ray diffraction data with the graphical user interface iMosflm

Harold R Powell, T Geoff G Battye, Luke Kontogiannis, Owen Johnson, Andrew G W Leslie
2017 Nature Protocols  
Using this protocol, a dataset of 360 images with ~2000 reflections per image can be processed in approximately four minutes.  ...  spread by a factor of at least 2) that is commonly employed with modern very fast readout detectors.  ...  Evans for many useful discussions on data processing and reduction and Kartik Manne for providing the images for the multilattice example.  ... 
doi:10.1038/nprot.2017.037 pmid:28569763 pmcid:PMC5562275 fatcat:ahazshexojdjbebwyudzpqbuve

Segmented simultaneous multi-slice diffusion-weighted imaging with navigated 3D rigid motion correction

Malte Riedel Né Steinhoff, Kawin Setsompop, Alfred Mertins, Peter Börnert
2021 Magnetic Resonance in Medicine  
The algorithm is compared to a navigated SMS reconstruction without gross motion correction in simulations and in vivo studies with four-fold interleaved 3-SMS diffusion tensor acquisitions.  ...  This work demonstrates the feasibility of retrospective 3D rigid motion correction from shot navigators for segmented SMS DWI.  ...  W is constructed from the inverse absolute values of a motion-free T 2 -weighted image filtered by a triangular window of about 4 mm isotropic k-space extent. = 10 − 2 was set empirically.  ... 
doi:10.1002/mrm.28813 pmid:33955588 fatcat:kj6sweufhba75pew4wm7lpdosy

A Seamless Image-Stitching Method Based on Human Visual Discrimination and Attention

Qingjie Cao, Zaifeng Shi, Pumeng Wang, Yang Gao
2020 Applied Sciences  
Coupled with the processing of an optimal stitching line locating method and the multi-band blending algorithm, the pixels of discontinuous items in mosaic images decrease significantly and the stitching  ...  In this paper, an image-stitching method for mosaic images with invisible seams is proposed, according to the research on the human visual system (HVS).  ...  The texture regions are mainly used to mask discontinuous edges in the mosaic image.  ... 
doi:10.3390/app10041462 fatcat:lwjieu4hr5bldisqwahbpg66g4

Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement

Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama
2017 IPSJ Transactions on System LSI Design Methodology  
However, long computation time is required to generate mask solutions with acceptable wafer image quality.  ...  However, IDM has been evaluated only under a relatively relaxed Edge Placement Error (EPE) constraint of the final mask solution.  ...  Mask Optimization Solution With Process Window Aware Inverse Correction (MOSAIC) algorithm proposed a relatively fast ILT methodology with some loss of accuracy [22] .  ... 
doi:10.2197/ipsjtsldm.10.28 fatcat:oyt2o67rbbamrkohdf6jttf5hy

ICORE: Image Co-addition with Optional Resolution Enhancement [article]

Frank Masci
2013 arXiv   pre-print
This is a variant of the classic Richardson-Lucy algorithm with the added benefit to simultaneously register and co-add multiple images to optimize signal-to-noise and sampling of the instrumental PSF.  ...  It can assume real (or otherwise "flat") image priors, mitigate "ringing" artifacts, and assess the quality of image solutions using statistically-motivated convergence criteria.  ...  This work was carried out at the California Institute of Technology, with funding from the National Aeronautics and Space Administration, under contract to the Jet Propulsion Laboratory.  ... 
arXiv:1301.2718v2 fatcat:xtkda47v3zgpzk73g6vn7zh55a

Remote sensing methods in medium spatial resolution satellite data land cover classification of large areas

S. E. Franklin, M. A. Wulder
2002 Progress in physical geography  
used in any large-area land cover classification must be robust and repeatable; because of data acquisition parameters, it is likely that compilation of the maps based on the classification will occur with  ...  The objective of this paper is to review and assess general medium spatial resolution satellite remote sensing land cover classification approaches with the goal of identifying the outstanding issues that  ...  However, it is important to be aware of the assumptions in the standard atmosphere model.  ... 
doi:10.1191/0309133302pp332ra fatcat:ybhgj57anbcspmrmgpmlm2sgau

RGISTools: Downloading, Customizing, and Processing Time Series of Remote Sensing Data in R [article]

U. Pérez-Goya, M. Montesino-SanMartin, A.F. Militino, M.D. Ugarte
2020 arXiv   pre-print
We first provide an overview of the package functionalities, namely downloading, customizing, and processing multispectral satellite imagery for a region and time period of interest as well as a recent  ...  Based on the purpose of the satellite imagery, the researcher must select the appropriate product and processing level. During the correction process, images are also geo-referenced.  ...  The generated cloud masks are saved in AppRoot directory, in a new folder named as the argument: R> wdir.ls8.mosaic <-file.path(wdir.ls8, "ls8_itoiz") R> lsCloudMask(src = wdir.ls8.mosaic, +  ... 
arXiv:2002.01859v1 fatcat:jmqledhz2jbjfn26g5qh7xx4d4

Image registration using log-polar mappings for recovery of large-scale similarity and projective transformations

S. Zokai, G. Wolberg
2005 IEEE Transactions on Image Processing  
The registration process yields the eight parameters of the perspective transformation that best aligns the two input images.  ...  We achieve subpixel accuracy through the use of nonlinear least squares optimization.  ...  This bandwidth reduction helps us process a high resolution image only at the focus of attention while aware of a wider field of view.  ... 
doi:10.1109/tip.2005.854501 pmid:16238049 fatcat:kl3ukkkze5b23bngxt6kleac4u

Simulation of Artificial Vision, III: Do the Spatial or Temporal Characteristics of Stimulus Pixelization Really Matter?

Ange´lica Pe´rez Fornos, Jo¨rg Sommerhalder, Benjamin Rappaz, Avinoam B. Safran, Marco Pelizzone
2005 Investigative Ophthalmology and Visual Science  
Five to six volunteers with normal vision were asked to read full pages of text with a 10°ϫ 7°viewing window stabilized in central vision.  ...  Results from the second experiment, using off-line processing, revealed a restricted range of Gaussian widths for which performances were equivalent or significantly better than that obtained with square  ...  Pixelization was achieved by overlaying the monitor with opaque masks containing a variable number of square perforations (pixels).  ... 
doi:10.1167/iovs.04-1173 pmid:16186381 fatcat:2j2xkpddwrfvxpfo64w66c7ezq

Binospec Software System [article]

Jan Kansky, Igor Chilingarian, Daniel Fabricant, Anne Matthews, Sean Moran, Martin Paegert, J. Duane Gibson, Dallan Porter, John Roll
2019 arXiv   pre-print
We subtract bias using the overscan region in every amplifier, correct for non-linearity, convert counts into electrons, and mosaic the resulting images.  ...  Weighting prevents the fit from ignoring regions with few measurements while mininizing χ 2 . The weighting procedure produces a smooth wavelength solution with an accuracy of ~0.025 pixel.  ... 
arXiv:1905.03321v1 fatcat:w7bhwsetbndcnakcobzssmiism

Transforming Image-Objects into Multiscale Fields: A GEOBIA Approach to Mitigate Urban Microclimatic Variability within H-Res Thermal Infrared Airborne Flight-Lines

Mir Rahman, Geoffrey Hay, Isabelle Couloigner, Bharanidharan Hemachandran
2014 Remote Sensing  
The optimal TURNsurface is then subtracted from the original TIR image, essentially creating a microclimatefree scene.  ...  Hay helped with ideas and technical advices during the development stage of the algorithm and also contributed in reviewing the paper.  ...  Isabelle Couloigner helped in editing the paper, and Bharanidharan Hemachandran contributed in collecting and processing ground weather station data.  ... 
doi:10.3390/rs6109435 fatcat:okbmmvdea5bdjfteni327ehozq

Cast Shadow Detection to Quantify the Aerosol Optical Thickness for Atmospheric Correction of High Spatial Resolution Optical Imagery

Daniel Schläpfer, Andreas Hueni, Rudolf Richter
2018 Remote Sensing  
Evaluation of the cast shadow masks shows an overall classification accuracy on an 80% level.  ...  The atmospheric correction of optical remote sensing data requires the determination of aerosol and gas optical properties.  ...  The Remote Sensing Laboratories of the University of Zurich (RSL) are thanked for providing the APEX data, and the support of Hendrik Wulf from RSL with the ASD ground reference measurements is gratefully  ... 
doi:10.3390/rs10020200 fatcat:x7dey3poanepfnv77hyspudr2a

Challenges in optics for Extremely Large Telescope instrumentation

P. Spanò, F. M. Zerbi, C. J. Norrie, C. R. Cunningham, K. G. Strassmeier, A. Bianco, P. A. Blanche, M. Bougoin, M. Ghigo, P. Hartmann, L. Zago, E. Atad-Ettedgui (+6 others)
2006 Astronomical Notes - Astronomische Nachrichten  
New materials and manufacturing processes are currently under study, both at research institutes and in industry.  ...  We also provide exploratory descriptions of "old" and "new" optical technologies together with suggestions to instrument designers to overcome some of the challenges placed by ELT instrumentation.  ...  To overcome this problem first tests with the the mosaic technique were performed. Mosaics The mosaic technique consists of assembling several gratings recorded and processed independently.  ... 
doi:10.1002/asna.200610610 fatcat:b4vdi365qnejfak37qfzudvkbi
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