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Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Y. K. Yong, S. O. R. Moheimani, B. J. Kenton, K. K. Leang
2012 Review of Scientific Instruments  
of high-bandwidth flexure-guided nanopositioning systems (nanopositioners).  ...  Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development  ...  With an increase in application for high-speed nanopositioning, such as for monitoring fast pace biological cell events 36 and high-speed nanometrology, 60 flexure-guided nanopositioners are becoming  ... 
doi:10.1063/1.4765048 pmid:23277965 fatcat:i6zxka3bxzee7e2peqbwr5yuky

A carbon nanofibre scanning probe assembled using an electrothermal microgripper

K Carlson, K N Andersen, V Eichorn, D H Petersen, K Mølhave, I Y Y Bu, K B K Teo, W I Milne, S Fatikow, P Bøggild
2007 Nanotechnology  
Based on manipulation experiments as well as a simple analysis, we show that shear pulling (lateral movement of the gripper) is far more effective than tensile pulling (vertical movement of gripper) for  ...  The insets show SEM images of tensile and shear pulling.  ...  The full range of the nanopositioning stage is 50 μm. The nanohandling station is placed onto the SEM positioning stage of a LEO 1450 SEM.  ... 
doi:10.1088/0957-4484/18/34/345501 fatcat:lbqwzvq6nrafvbeb7akalutar4

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Chaoyang Shi, Devin K Luu, Qinmin Yang, Jun Liu, Jun Chen, Changhai Ru, Shaorong Xie, Jun Luo, Ji Ge, Yu Sun
2016 Microsystems & Nanoengineering  
Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices.  ...  A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside  ...  SEM-guided, automated AFM manipulation. SEM imaging can be employed to guide the AFM cantilever to localize the regions of interest where AFM imaging or measurement is conducted.  ... 
doi:10.1038/micronano.2016.24 pmid:31057824 pmcid:PMC6444728 fatcat:d3bulo27lfhcfd25hggh3lqifi

In situ nanomechanical testing in focused ion beam and scanning electron microscopes

D. S. Gianola, A. Sedlmayr, R. Mönig, C. A. Volkert, R. C. Major, E. Cyrankowski, S. A. S. Asif, O. L. Warren, O. Kraft
2011 Review of Scientific Instruments  
Local strain measurements are obtained using digital image correlation of electron images taken during testing.  ...  A transducer based on a three-plate capacitor system is used for high-fidelity force and displacement measurements.  ...  ACKNOWLEDGMENTS The authors thank Gunther Richter for providing metal nanowhiskers. Thanks go to Haijun Jin and Simone Schendel for providing nanoporous Au specimens and preparing the pillars.  ... 
doi:10.1063/1.3595423 pmid:21721703 fatcat:fh2nlr645ffs3n2ebdn76lvw5i

Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing

2014 IEEE Transactions on Control Systems Technology  
The experimental results demonstrate the efficiency of the proposed scheme and demonstrate the suitability of the designed device for nanopositioning applications.  ...  The characterization tests carried out show that the MEMS nanopositioner can achieve a range of displacement in excess of ±5µm for each of the x and y axes, with a response time better than 300ms.  ...  The SEM images were obtained with the assistance of the University of Newcastle's Electron Microscope and X-Ray Unit. This work was supported by the Australian Research Council.  ... 
doi:10.1109/tcst.2013.2284923 fatcat:hqq4u3y62baqjegwk54hxodqjm

Challenges in nanometrology: high precision measurement of position and size

Harald Bosse, Bernd Bodermann, Gaoliang Dai, Jens Flügge, Carl G. Frase, Hermann Groß, Wolfgang Häßler-Grohne, Paul Köchert, Rainer Köning, Frank Scholze, Christoph Weichert
2015 TM. Technisches Messen  
The estimated uncertainty for CD measurements on high quality Si line structures is  ...  AbstractRecent developments of the PTB in high precision position and size metrology as support for different nanotechnology applications are described.  ...  Figure 16 shows the basic scheme of the metrological approach, which was taken here, while fig. 17 shows typical SEM and HR-TEM images of the prepared Si line features.  ... 
doi:10.1515/teme-2015-0002 fatcat:mu6idjmxabgwrj5hap7lvgsfpq

Closed-Loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation*

Anthony G. Fowler, Micky Rakotondrabe, S.O. Reza Moheimani
2013 IFAC Proceedings Volumes  
Testing of the device shows that stage displacements in excess of ±5 µm are achievable for both the x and y axes.  ...  The displacement measurements are utilized as part of an implemented closed-loop control scheme that uses both feedforward and feedback mechanisms based on the principle of internal model control.  ...  The SEM images were obtained with the assistance of the University of Newcastle's Electron Microscope and X-Ray Unit. This work was supported by the Australian Research Council.  ... 
doi:10.3182/20130410-3-cn-2034.00115 fatcat:yil56vzhfzde3dn3zvbxdvdksu

A fibered interference scanning optical microscope for living cell imaging [article]

Jean-Baptiste Decombe, Wilfrid Schwartz, Catherine Villard, Hervé Guillou, Joël Chevrier, Serge Huant, Jochen Fick
2011 arXiv   pre-print
We report on the 3-dimensional imaging of biological cells including living neurons by a recently developed fibered interferometric Scanning Optical Microscope.  ...  Motte from Institut Néel for the fibroblast substrate preparation and fiber tip fabrication, respectively.  ...  For image scanning a three axis piezoelectric nanopositioning system (Mad City Labs Nano-3D200) is used.  ... 
arXiv:1010.4154v2 fatcat:t2bim2i3tfdbbfm2eabvdasqru

Coupling of optical far fields into apertureless plasmonic nanofiber tips

David Auwärter, Josip Mihaljevic, Alfred J. Meixner, Claus Zimmermann, Sebastian Slama
2013 Physical Review A. Atomic, Molecular, and Optical Physics  
Moreover, the fibre tip was used as scanning probe device for measuring the beam waist of a focussed laser beam.  ...  The area of the sensitive zone on the tip is estimated as A ∼ ∆z · w tip = (1.2 ± 0.1) × 10 −12 m 2 , where the width of the tip w tip = (0.7 ± 0.05) µm is evaluated from a SEM image at a distance ∆z from  ...  (SEM)-pictures before and after the coating step.  ... 
doi:10.1103/physreva.88.063830 fatcat:ayz3pzzfm5azvbufxgib2wctdq

Living cell imaging by far-field fibered interference scanning optical microscopy

Jean-Baptiste Decombe, Wilfrid Schwartz, Catherine Villard, Hervé Guillou, Joël Chevrier, Serge Huant, Jochen Fick
2011 Optics Express  
We report on the imaging of biological cells including living neurons by a dedicated fibered interferometric scanning optical microscope.  ...  Motte from Institut Néel for the fibroblast substrate preparation and fiber tip fabrication, respectively.  ...  For image scanning, a three axis piezoelectric nanopositioning system (Mad City Labs Nano-3D200) is used.  ... 
doi:10.1364/oe.19.002702 pmid:21369091 fatcat:attrawz2cjavzkmej3taveuloe

On-chip cavity optomechanical coupling

Bradley D Hauer, Paul H Kim, Callum Doolin, Allison JR MacDonald, Hugh Ramp, John P Davis
2014 EPJ Techniques and Instrumentation  
We would also like to thank Don Mullin, Devon Bizuk and Greg Popowich for technical assistance.  ...  Paul Barclay for numerous helpful suggestions and insight into both the theoretical and practical applications of optomechanics.  ...  As well, an angled SEM image of the same device (not to scale) is overlaid on the chamber.  ... 
doi:10.1140/epjti4 fatcat:jgnp4idvfbhbjajs5wuhyljsk4

A novel microscale selective laser sintering (μ-SLS) process for the fabrication of microelectronic parts

Nilabh K. Roy, Dipankar Behera, Obehi G. Dibua, Chee S. Foong, Michael A. Cullinan
2019 Microsystems & Nanoengineering  
Next, the substrate is precisely positioned under an optical subsystem using a set of coarse and fine nanopositioning stages.  ...  One of the biggest challenges in microscale additive manufacturing is the production of three-dimensional, microscale metal parts with a high enough throughput to be relevant for commercial applications  ...  Acknowledgements The authors would also like to thank NXP semiconductors and National Science Foundation for sponsoring this project.  ... 
doi:10.1038/s41378-019-0116-8 pmid:34567614 pmcid:PMC8433322 fatcat:obpampnlqnd45n3idlrl63kt4e

Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback Control

Jing Ouyang, Yong Zhu
2012 Journal of microelectromechanical systems  
The device and method presented in this paper are valuable for a range of microelectromechanical systems applications, including on-chip nanoscale mechanical testing and nanopositioning. [2011-0282]  ...  A new feedback scheme is further explored, where the ZTA is treated as a two-input (applied current and external force) and two-output (displacement and electric resistance) system.  ...  Dong for the valuable discussion on the feedback control and Q. Qin for the assistance with the in situ scanning electron microscope (SEM) experiments.  ... 
doi:10.1109/jmems.2012.2189361 fatcat:zvgiil6kevbzja2qxez33cn4sm

Nanoimprinted High-Refractive Index Active Photonic Nanostructures Based on Quantum Dots for Visible Light

Carlos Pina-Hernandez, Alexander Koshelev, Scott Dhuey, Simone Sassolini, Michela Sainato, Stefano Cabrini, Keiko Munechika
2017 Scientific Reports  
novel method to realizing printed active photonic devices was developed using nanoimprint lithography (NIL), combining a printable high-refractive index material and colloidal CdSe/CdS quantum dots (QDs) for  ...  We believe that this work represents a powerful and cost-effective route for the development of numerous nanophotonic structures and devices that will lead to the emergence of new applications.  ...  Figure 2 . 2 (a) SEM cross-section image and (b) top view image of an imprinted photonic device with embedded CdSe/CdS QDs.  ... 
doi:10.1038/s41598-017-17732-0 pmid:29247228 pmcid:PMC5732276 fatcat:ym2sr6ddwvavhbs6gsftny2ev4

On-chip optical isolator and nonreciprocal parity-time symmetry induced by stimulated Brillouin scattering [article]

Jiyang Ma, Jianming Wen, Yong Hu, Shulin Ding, Xiaoshun Jiang, Liang Jiang, Min Xiao
2018 arXiv   pre-print
Thanks to the guided acoustic wave and accompanying momentum-conservation condition, SBS also enables us to realize the first nonreciprocal parity-time symmetry in two directly-coupled microresonators.  ...  Realization of chip-scale nonreciprocal optics such as isolators and circulators is highly demanding for all-optical signal routing and protection with standard photonics foundry process.  ...  the SBS process. d, SEM image of the Brillouin toroid used in our experiments.  ... 
arXiv:1806.03169v1 fatcat:bbaelwfehfamriwi5t2xdjonrm
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