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A review on applications of capacitive displacement sensing for capacitive proximity sensor

Yong Ye, Chiya Zhang, Chunlong He, Xi Wang, Jianjun Huang, Jiahao Deng
2020 IEEE Access  
Capacitive displacement sensing, as one of the three sensing modalities, works for long distance and can be unitized to measure more physical quantities compared with capacitive volume and deformation  ...  After that, we present applications of capacitive displacement sensing under three broad categories: distance measurements, indirect measurements, and the applications applied in smart environments.  ...  APPLICATIONS CPSs in displacement sensing modality are able to measure position and displacement with high accuracies.  ... 
doi:10.1109/access.2020.2977716 fatcat:qhxtchkrhzctvcapmqxsatnvxa

Methods and Research for Multi-Component Cutting Force Sensing Devices and Approaches in Machining

Qiaokang Liang, Dan Zhang, Wanneng Wu, Kunlin Zou
2016 Sensors  
Robust and effective sensing systems with capability of monitoring the cutting force in machine operations in real time are crucial for realizing the full potential of cutting capabilities of computer  ...  The main objective of this paper is to present a brief review of the existing achievements in the field of multi-component cutting force sensing systems in modern manufacturing.  ...  Many of the latest researches and developments associated with cutting force sensing systems involve capacitive sensors that provide precise displacement measurement.  ... 
doi:10.3390/s16111926 pmid:27854322 pmcid:PMC5134585 fatcat:bsyyeylchffhthdwhvdumfhjlm

3D Printed Elastomeric Lattices with Embedded Deformation Sensing

Carolyn Carradero Santiago, Christiaan Randall-Posey, Andrei-Alexandru Popa, Lars Duggan, Brian Vuksanovich, Pedro Cortes, Eric MacDonald
2020 IEEE Access  
INDEX TERMS Additive manufacturing, lattices, elastomers, embedded sensing, Internet of Things. 41394 This work is licensed under a Creative Commons Attribution 4.0 License.  ...  A proposed sensor system was developed that weaves unjacketed wires at two distinct layers in a lattice to form a complex capacitor; the capacitance increases as the lattice is compressed and can detect  ...  ACKNOWLEDGMENTS The authors would like to thank the Office of Research and the Friedman Endowment for supporting this work at Youngstown State University.  ... 
doi:10.1109/access.2020.2973664 fatcat:wowjtgur55eo7hug3zi7publwu

In-process force monitoring for precision grinding semiconductor silicon wafers

Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, R. Ryan Vallance
2005 International Journal of Manufacturing Technology and Management (IJMTM)  
The results indicate that force measurements offer good performance for monitoring precision wafer grinding since this approach provides excellent contact sensitivity, high signal resolution, and has sufficient  ...  Several experiments evaluate this force sensing approach in detecting workpiece contact, process monitoring with small depths of cut, and detecting workpiece defects.  ...  Figure 2 also displays the four stator-embedded, high-resolution capacitive displacement sensors (1 mV/nm Lion Precision C1-C) that target the rotor.  ... 
doi:10.1504/ijmtm.2005.007695 fatcat:32srocxm6fdkpoiahmobr46ddu

A Novel Method for Detecting the Two-Degrees-of-Freedom Angular Displacement of a Spherical Pair, Based on a Capacitive Sensor

Shengqi Yang, Yulei Xu, Yongsen Xu, Tianxiang Ma, Hao Wang, Jinghua Hou, Dachuan Liu, Honghai Shen
2022 Sensors  
Compared with the existing sensors that measure the 2-DOF angular displacement signal of the ball pair, the sensor proposed in this study has an integrated structure, which can be integrated into the spherical  ...  The simulation analysis and experimental results show that the spherical capacitive sensor has an approximately linear output in different directions, and the measured output capacitance is as high as  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/s22093437 pmid:35591127 pmcid:PMC9103906 fatcat:uxbwdpvhp5ehpbcsnkufyvrr2y


1957 Science  
Measurements over the range between 0.1 and 5 Mcy/sec, can be made with reduced accuracy.  ...  S266) * CAPACITANCE BRIDGE is designed for measurement of capacitance and dissipation factor at a frequency of 1 Mcy/ sec.  ... 
doi:10.1126/science.126.3263.90 pmid:17792928 fatcat:k6mnpfxrhfcevhznomuyyotcja

The Analysis Of Radial/Axial Error Motion On A Precision Rotation Stage

Jinho Kim, Dongik Shin, Deokwon Yun, Changsoo Han
2007 Zenodo  
In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors.  ...  To evaluate and improve the performance of such precision rotary stage, unessential movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed.  ...  In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors.  ... 
doi:10.5281/zenodo.1056729 fatcat:fqf244x2zzd4tptgmcfasrtlbe

Monitoring force in precision cylindrical grinding

Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, R. Ryan Vallance
2005 Precision engineering  
Results indicate that force measurements are capable of providing useful feedback in precision grinding with excellent contact sensitivity, resolution, and detection of events occurring within a single  ...  These challenges are met by incorporating non-contact displacement sensors into an aerostatic spindle that are calibrated to measure grinding forces from changes in the gap between the rotor and stator  ...  In this work, we use non-contact, high sensitivity capacitive displacement sensors to measure relative displacements between the rotor and stator of the workpiece spindle.  ... 
doi:10.1016/j.precisioneng.2004.11.003 fatcat:f2uivdyi7rgbtj6eapwljw4huu

The Transition to Optical Wafer Flatness Metrology

John F. Valley
2003 AIP Conference Proceedings  
disruption of accepted manufacturing baselines.  ...  Comparative data (from advanced 300mm wafers) between capacitive and optical flatness measurement tools permits us to conclude that the industry transition to optical dimensional metrology can occur without  ...  ACKNOWLEDGMENTS The authors are grateful for critical input and support from customers and peers, without which the pace of improvement would slow and the joy of work diminish.  ... 
doi:10.1063/1.1622504 fatcat:huldjvjwrrd4pcknutkskvkqeu

Tri-Mode Capacitive Proximity Detection Towards Improved Safety in Industrial Robotics

Fan Xia, Fabio Campi, Behraad Bahreyni
2018 IEEE Sensors Journal  
Experimental results are provided to demonstrate that the system is able to detect a metallic object at distances of up to 18cm with high resolutions, track its motion, and provide an estimate for its  ...  The sensing element features a matrix of electrodes that can be reconfigured to various arrangements at run-time by controlling the interface electronics to obtain a more detailed perception of the ambient  ...  Inductive sensors are useful for inspection applications as they provide highly-precision measurements.  ... 
doi:10.1109/jsen.2018.2832637 fatcat:rjkrqqlcwzb6ziclilkohnr5wu

Variation in Capacitance with different Conditions of Sensor

Seema Paliwal, Jyoti Krayla
2015 International Journal of Computer Applications  
The Main advantages that capacitive sensing has over other detection approaches are that it can sense different kinds of materials (skin, plastic, metal, liquid), it is contactless and wear-free, it has  ...  the ability to sense up to a large distance with small sensor sizes, the PCB Sensor is low cost, and it is a lowpower solution.  ...  Figure-5 Mutual capacitance illustration CHARACTERESTICS OF CAPACITIVE SENSORS (1) Simple structure, strong adaptability and capacitive sensor structure is simple, easy to manufacture high precision,  ... 
doi:10.5120/ijca2015906365 fatcat:hqvb3qfp3rbtzjmawb2c3rwuki

The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control

Christoph Jenke, Jaume Pallejà Rubio, Sebastian Kibler, Johannes Häfner, Martin Richter, Christoph Kutter
2017 Sensors  
However, sensor technologies feature a yet undetermined accuracy for measuring highly pulsatile micropump flow.  ...  Results showed that besides particle robustness of sensors, controlling resistive and capacitive damping are key aspects for setting up reproducible and reliable liquid dosing systems.  ...  We also thank Christian Wald for lasering of pressure sensors and Martin Wackerle for measurement support and data processing support.  ... 
doi:10.3390/s17040755 pmid:28368344 pmcid:PMC5421715 fatcat:hnuaojzkzzhajj7awau4uvwhla

Rugged and Compact Three-Axis Force/Torque Sensor for Wearable Robots

Heeyeon Jeong, Kyungjun Choi, Seong Jun Park, Cheol Hoon Park, Hyouk Ryeol Choi, Uikyum Kim
2021 Sensors  
Additionally, to measure the three-axis force/torque, we design three capacitance-sensing cells.  ...  In this paper, we propose a novel three-axis force/torque sensor for wearable robots that is compact and has a high load capacity.  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/s21082770 pmid:33919929 pmcid:PMC8070922 fatcat:phb2niq2rbdp7k4hdfef4xkcgm

Magnetoresistive Sensors for the Condition Monitoring of High-frequency Spindles

Rolf Slatter, Lars Holland, Eberhard Abele
2016 Procedia CIRP  
Tests demonstrate that this solution can resolve axial and radial displacements of less than 0.5 m with high repeatability under typical operating conditions.  ...  Position sensors based on the giant magnetoresistive (GMR) effect have been specially adapted to measure directly the radial and axial displacement of the spindle shaft.  ...  The new sensor system is demonstrably capable of measuring displacements with a resolution of better than 0.5 μm with high repeatability and is also capable of measuring highly dynamic displacements.  ... 
doi:10.1016/j.procir.2016.03.161 fatcat:grjsaicwknb6rndrfefzwh77ce

Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines

Kuang-Chao Fan, Rui-Jun Li, Peng Xu
2018 Nanomanufacturing and Metrology  
Moreover, a high-precision capacitive sensor is costly.  ...  The size of a piezoresistive sensor is compact, but its accuracy is lower than that of a capacitive sensing device.  ...  Acknowledgements The reported work was funded by the National Natural Science Foundation of China (51675157).  ... 
doi:10.1007/s41871-018-0025-8 fatcat:6umsr5c7gbd4jmp6ln2sbilv3q
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