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Dynamic Measurement of Large Displacement Using Heterodyne Laser Interferometry
ヘテロダイン干渉法による動的変位量の測定
1998
Journal of the Japan Society for Precision Engineering
ヘテロダイン干渉法による動的変位量の測定
Preserved Fulltext
Teramoto and K.Iwata : Optical Interferometry for Nanometer Measurement of a Large Step,J. Jpn Soc. Prec. Eng., 28, 1, (1994) 64. 7 ...
doi:10.2493/jjspe.64.1132
fatcat:kvdazeac7ndcni5cgf44noxz6u
Dynamic Measurement of Very Small Angular Motions Using Heterodyne Laser Interferometry
ヘテロダイン干渉法による微小角の動的測定
1994
Journal of the Japan Society for Precision Engineering
ヘテロダイン干渉法による微小角の動的測定
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With these techniques, very small and dynamic angular motions of a linear motor were precisely measured in the directions of pitching and yawing with wide dynamic ranges. ...
In this study, laser interferometry technique was utilized, noting on the fact that angular motions can be measured by detecting differential path length change between two parallelly spaced optical paths ...
59,5(1993)755. 6) P.Greier,N.Bobroff,W.T.EstlerandY.H.Queen:Comparison of Angle Measuring Interferometers and Autocollimators,
Fig Fig. 12 Measurement result under friction
ResidualErrors in Laser Interferometry ...
doi:10.2493/jjspe.60.1345
fatcat:xdhq5viwzffp7evc2a7c3fpvj4
Digitaiization of Dynamic Measurement of Nanometer-order Displacement Using Heterodyne Laser Interferometry
ヘテロダイン干渉法による動的変位計測のディジタル化
2002
Journal of the Japan Society for Precision Engineering
ヘテロダイン干渉法による動的変位計測のディジタル化
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参 考 文 献 (1)中 山 貫,津 田展 宏,田 中 充:ナ ノ メー タオ ー ダ の 計 測 技 術 の現 状 と将 来,精 密 工 学 会 誌 3 ( (5) Y.Takahashi, M.Kiso, T.Ishii H.Teramoto and K.Iwata: Optical Interferometry for Nanometer Measurement of a Large Step ...
doi:10.2493/jjspe.68.1436
fatcat:i62wgzvhfbde3f4dwhtzyfpism
Optical Methods In Engineering Measurements
1986
Optics in Engineering Measurement
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holographic interferometry The principle was discussed in heterodyne interferometry /1/ . ...
For the fringe analysis in interferometry for testing optical components the different methods can be classified into static and dynamic methods. ...
doi:10.1117/12.952346
fatcat:rfoobcsoqredbhhcikqxx4jdzy
Phase-Sensitive Surface Plasmon Resonance Sensors: Recent Progress and Future Prospects
2017
Sensors
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To date, several methods have been developed for SPR phase interrogation, including heterodyne detection, polarimetry, shear interferometry, spatial phase modulation interferometry and temporal phase modulation ...
interferometry. ...
Interferometry Interferometry is a widely used optical phase measurement method that provides an important advantage over other phase detection techniques (e.g., ellipsometry, heterodyning) in that it ...
doi:10.3390/s17122819
pmid:29206182
pmcid:PMC5751602
fatcat:kqem4nw56vewjnmbsewirpki64
High Precision Optical Surface Topometry
1993
Berichte der Bunsengesellschaft für physikalische Chemie
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Two-Wavelength Heterodyne Interferometry Two-wavelength heterodyne interferometry can overcome some of the drawbacks of classical interferometry. ...
The heterodyne signals Ih(t) are where (16) In double heterodyne interferometry two laser wavelengths and two heterodyne frequencies are used simultaneously. ...
doi:10.1002/bbpc.19930971225
fatcat:k62wpuyefnc4bfvp4ectjgvkw4
Real-Time Heterodyne Interferometry with Correlation Image Sensor
[chapter]
2012
Interferometry - Research and Applications in Science and Technology
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Heterodyne Interferometry with Correlation Image Sensor
Real-Time Heterodyne Interferometry with Correlation Image Sensor www.intechopen.com ...
The real-time heterodyne SPI system for in-plane deformation in Figure 7 (a) was employed for monitoring an object under dynamic deformation. ...
doi:10.5772/36253
fatcat:j3fxetzt6nafrdkn4wiquqe7ae
Holographic Contouring of Near Crack Tip Displacements
[chapter]
1989
Review of Progress in Quantitative Nondestructive Evaluation
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Figure 2 - 2 Arrangement for quasi-heterodyne holographic interferometry. ...
Quasi-heterodyne holographic interferometry, shown tobe accurate to better than 1/100 of a fringe [2] , was used with digital image processing techniques to contour the region of interest. ...
doi:10.1007/978-1-4613-0817-1_228
fatcat:ct2siqenxfa2dmrcdnoqnezo6i
Experimental comparison of autodyne and heterodyne laser interferometry using an Nd:YVO_4 microchip laser
2011
Optical Society of America. Journal A: Optics, Image Science, and Vision
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LOFI interferometry is demonstrated to show higher performances than heterodyne interferometry for a wide range of laser power and detection level of noise. ...
Using a Nd:YVO4 microchip laser with a relaxation frequency in the megahertz range, we have experimentally compared a heterodyne interferometer based on a Michelson configuration with an autodyne interferometer ...
In this paper, we refer to autodyne laser interferometry when the heterodyne wave mixing takes place inside the cavity of the laser source, while we speak about heterodyne laser interferometry when the ...
doi:10.1364/josaa.28.001741
pmid:21811337
fatcat:ftxgdcirmbandax5fmsr73w7fq
Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry
2012
International Journal of Metrology and Quality Engineering
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A stabilized low power dual-frequency laser heterodyne interferometer (ZMI-1000A) designed to measure linear and angular displacement with nominal measurement resolution 1.24 nm and 0.0025 arcsec, respectively ...
Heterodyne interferometry is inherently more accurate than standard interferometry because it is less sensitive to intensity noise [2, 3] . ...
We have performed an uncertainty analysis of the in-plane displacements measured by heterodyne interferometry. ...
doi:10.1051/ijmqe/2012013
fatcat:iqmglivhlzcareotshb5dyjsie
Control and tuning of a suspended Fabry–Perot cavity using digitally enhanced heterodyne interferometry
2012
Optics Letters
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We present the first demonstration of real-time closed-loop control and deterministic tuning of an independently suspended Fabry-Perot optical cavity using digitally-enhanced heterodyne interferometry, ...
For these reasons, readouts based on the newly developed digitally-enhanced heterodyne interferometry (DEHI) technique [9] are of great interest to the gravitational-wave community. ...
Fig. 3 . 3 (Colour online) Automated acquisition of cavity length control using digitally-enhanced heterodyne interferometry. Top -DEHI error signal (i.e. round-trip cavity phase). ...
doi:10.1364/ol.37.004952
pmid:23202101
fatcat:ic4bagdibjee3d7amhybubr24y
The Applications of the Heterodyne Interferoemetry
[chapter]
2012
Interferometry - Research and Applications in Science and Technology
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The final application of the heterodyne interferometry that I would like to talk about is the concentration measurement. In this section, I will roughly classify the method into two categories. ...
32 review some refractometer using heterodyne interferometer. ...
Before I mention the applications of the heterodyne interferometry, I would like to describe several types of heterodyne interferometry. ...
doi:10.5772/34535
fatcat:cwxqxky6rrdhxbifw3tq5hgylu
Multichannel averaging phasemeter for picometer precision laser metrology
1999
Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
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The Micro-Arcsecond Metroiogy (MAM) team at the Jet Propulsion Laboratory has developed a precision phasemeter for the Space Interferometry Mission (SIM). ...
The current version of the phasemeter is well-suited for picometer accuracy distance measurements and tracks at speeds up to 50 cm/sec, when coupled to SIM's 1.3 micron wavelength heterodyne laser metrology ...
Keywords: Laser interferometry,
picometer metrology,
nanometer
metrology,
laser metrology,
heterodyne
interferometry,
VME data acquisition, FPGA circuits, cyclic averaging
1.INTRODUCTION
The ...
doi:10.1117/12.347767
fatcat:h3e5mmu4hvd2fn6byblajkncue
Heterodyne Holography Applications In Studies Of Small Components
1985
Optical Engineering: The Journal of SPIE
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Subject terms: holographic interferometry; heterodyne hologram interferometry; quantitative interpretation of interferograms; strain; displacement. ...
Heterodyne hologram interferometry was used to study loaddeformation characteristics of computer microcomponents that were surface mounted on a printed circuit board. ...
Heterodyne hologram interferometry The characteristic principle of heterodyne hologram interferometry is that each of the two object fields (in the case of a double-exposure hologram) is recorded with ...
doi:10.1117/12.7973587
fatcat:wteopv6dcvgxfbzygwnm2pm4su
Simple digital phase-measuring algorithm for low-noise heterodyne interferometry
2016
Measurement science and technology
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2016 pre-print arXiv:1602.03701v1 fatcat:njj36phbx5ahtligs32x3wtpa4
This technique can be applied to a phase meter for measuring dynamic phase differences with high resolution, particularly for heterodyne interferometry. ...
In addition, by applying this method to a commercial heterodyne interferometer, the floor-noise level is confirmed to be 7×10^-14m/√(Hz) from 4 kHz to 1 MHz. ...
The concept of the phase-measuring algorithm and its application including the heterodyne interferometer, phase-noise measuring instrument, and phase-locked loop is the subject of the patent application ...
doi:10.1088/0957-0233/27/8/085001
fatcat:5hkbql22grdilji32kemymvgum
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