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Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design

Jiaojiao Ou, Bei Yu, Jhih-Rong Gao, David Z. Pan, Moshe Preil, Azat Latypov
2015 Proceedings of the 25th edition on Great Lakes Symposium on VLSI - GLSVLSI '15  
Recently directed self-assembly (DSA) has emerged as a promising lithography technique candidate for cut manufacturing because of its ability to form small cylinders inside the guiding templates and the  ...  In this paper, we perform a comprehensive study on the DSA cut mask optimization problem.  ...  patterning lithography, E-beam lithography, extreme ultra violet (EUV), and directed self-assembly (DSA) [1, 2] .  ... 
doi:10.1145/2742060.2742114 dblp:conf/glvlsi/OuYGPPL15 fatcat:pvijxekn55arhjnx7rnkpimna4

Directed self-assembly cut mask assignment for unidirectional design

Jiaojiao Ou, Bei Yu, Jhih-Rong Gao, David Z. Pan
2015 Journal of Micro/Nanolithography  
Recently, directed self-assembly (DSA) has emerged as a promising lithography solution for cut manufacturing.  ...  We perform a comprehensive study on the DSA aware mask optimization problem to provide a DSA friendly design on cut layers.  ...  MEMS MOEMS 031211-6 Jul-Sep 2015 • Vol. 14(3) Table 2 2 Comparison with extended directed self-assembly (DSA) guiding templates.Ou et al.: Directed self-assembly cut mask assignment. . .  ... 
doi:10.1117/1.jmm.14.3.031211 fatcat:s6b3hyyjizdfzmvvwrvi5yhon4

Toward Unidirectional Routing Closure in Advanced Technology Nodes

Xiaoqing Xu, David Z. Pan
2017 IPSJ Transactions on System LSI Design Methodology  
However, unidirectional layout style introduces significant impacts on the physical design flow.  ...  In advanced technology nodes, unidirectional layout is strongly preferred for high-density metal layers for better manufacturability.  ...  Due to the delay of emerging lithography techniques, such as extreme ultraviolet lithography (EUVL), electron-beam lithography (E-beam) and directed self-assembly (DSA), multiple patterning lithography  ... 
doi:10.2197/ipsjtsldm.10.2 fatcat:my5uqy2kh5ho3lrrfakdy4yuta

Design for manufacturability and reliability in extreme-scaling VLSI

Bei Yu, Xiaoqing Xu, Subhendu Roy, Yibo Lin, Jiaojiao Ou, David Z. Pan
2016 Science China Information Sciences  
Keywords design for manufacturability, design for reliability, VLSI CAD Citation Yu B, Xu X Q, Roy S, et al. Design for manufacturability and reliability in extreme-scaling VLSI.  ...  In this paper, we will discuss some key process technology and VLSI design co-optimization issues in nanometer VLSI.  ...  Acknowledgements This work was supported in part by US National Science Foundation, Semiconductor Research Corporation, National Natural Science Foundation of China, TOSHIBA, and CUHK Direct Grant for  ... 
doi:10.1007/s11432-016-5560-6 fatcat:lz5ebjqeprbanbkgxqxjeouip4

Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications

V. Milanovic, G.A. Matus, D.T. McCormick
2004 IEEE Journal of Selected Topics in Quantum Electronics  
for rotation and pistoning, respectively.  ...  Index Terms-High aspect ratio, microfabrication, micromachining, micromirror, microoptoelectromechanical systems (MOEMS), optical microelectromechanical systems (MEMS), optical phased array, self-alignment  ...  Cagdaser for helpful discussions and reading of the manuscript, and K. Castelino and M. Chang for discussions and assistance in closed-loop control measurements.  ... 
doi:10.1109/jstqe.2004.829205 fatcat:5ba3u4hsd5egfanql6oipz26ui

Pushing multiple patterning in sub-10nm

David Z. Pan, Lars Liebmann, Bei Yu, Xiaoqing Xu, Yibo Lin
2015 Proceedings of the 52nd Annual Design Automation Conference on - DAC '15  
In this paper, we provide a comprehensive overview on the state-of-the-art research results for MPL, from synergistic mask synthesis to physical design.  ...  Multiple patterning lithography (MPL) poses many new challenges to both mask design and IC physical design.  ...  lithography techniques, such as extreme ultraviolet lithography (EUVL), electric beam lithography (EBL), and directed self-assembly (DSA) [6] .  ... 
doi:10.1145/2744769.2747940 dblp:conf/dac/PanLYXL15 fatcat:bdmcbgmg2rbapcewkitnfn7ydm

Bioinspired Unidirectional Liquid Transport Micro-nano Structures: A Review

Liwen Zhang, Guang Liu, Huawei Chen, Xiaolin Liu, Tong Ran, Yi Zhang, Yang Gan, Deyuan Zhang
2021 Journal of Bionic Engineering  
With newly developed smart materials, various liquid transport regulation strategies are also summarized for the control of transport speed, direction guiding, etc.  ...  Finally, we provide new insights and future perspectives of the directional transport materials.  ...  Another mold replica-tion is based on the micro-cones array formed by ferrofluid self-assembly [33] .  ... 
doi:10.1007/s42235-021-0009-z fatcat:jawp5zfihfffpc472hddaxowca

OpenWorkstation: A modular open-source technology for automated in vitro workflows

Sebastian Eggert, Pawel Mieszczanek, Christoph Meinert, Dietmar W Hutmacher
2020 HardwareX  
The base setup consists of a pipetting and transport module and is designed to execute basic protocol steps for in vitro research applications, including pipetting operations for liquids and viscous substances  ...  We present a Systems Engineering framework for customized module development, guidance for the design and assembly of the presented modules, and operational instructions on the usage of the workstation  ...  Acknowledgements The authors acknowledge the members of the Centre in Regenerative Medicine at QUT, in particular, Ross Kent and Jose Malayil for the build revision, and Antonia Horst for her helpful suggestions  ... 
doi:10.1016/j.ohx.2020.e00152 pmid:35498237 pmcid:PMC9041211 fatcat:hlk6r4iwxzhnrpkmoffhk6tjb4

Pop-up book MEMS

J P Whitney, P S Sreetharan, K Y Ma, R J Wood
2011 Journal of Micromechanics and Microengineering  
We present a design methodology and manufacturing process for the construction of articulated three-dimensional microstructures with features on the micron to centimeter scale.  ...  Pop-up books and other forms of paper engineering inspire designs consisting of one complex part with a single assembly degree of freedom.  ...  Acknowledgments The authors thank Dr James Weaver for providing the SEM images.  ... 
doi:10.1088/0960-1317/21/11/115021 fatcat:zzpkumu4hfdnjgseegzgepwrzm

Chapter 1 [chapter]

2018 Passive Micro-Optical Alignment Methods  
Reasonable efforts have been made to publish reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials or for the consequences of their  ...  For solder self-alignment, these parameters can be designed for optimum performance.  ...  Hybrid integration of optical elements on the silica waveguide and alignment free assembly is used for cost reduction. The packaging design is based on the SMT module.  ... 
doi:10.1201/9781420027723-5 fatcat:enlpj7g6p5ax5fmfncue2gfmni

Bulk silicon micromachining for MEMS in optical communication systems

Martin Hoffmann, Edgar Voges
2002 Journal of Micromechanics and Microengineering  
The excellent mechanical properties as well as the optical properties and orientation-dependent etching behaviour of crystalline silicon attract attention for reliable optical components based on surface  ...  Crystalline silicon has become more and more important for optical MEMS.  ...  Acknowledgments We would like to thank Peter Kopka, Sabine Dickhut and Dirk Nüsse for their excellent work on optical MEMS in Dortmund.  ... 
doi:10.1088/0960-1317/12/4/301 fatcat:4krmm7uq2nc5xbwrbjgofcoghq

Front Matter: Volume 6897

Proceedings of SPIE, Louay A. Eldada, El-Hang Lee
2008 Optoelectronic Integrated Circuits X  
Publication of record for individual papers is online in the SPIE Digital Library.  ...  The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters.  ...  Jürgen Van Erps acknowledges the FWO for financial support.  ... 
doi:10.1117/12.791604 fatcat:z7oyykjwwben5ca4pesdut3xji

A method for building self-folding machines

S. Felton, M. Tolley, E. Demaine, D. Rus, R. Wood
2014 Science  
We characterize the behavior of this composite with models and experimental data, and use this information to develop design rules for self-folding.  ...  This dissertation demonstrates that self-folding can produce functional machines with a new laminate we refer to as a shape memory composite.  ...  based off of the unidirectional composite presented in Section 3.2.  ... 
doi:10.1126/science.1252610 pmid:25104380 fatcat:vcxrwg4mw5bvbarxowscnnjovy

Design for Manufacturing With Emerging Nanolithography

David Z. Pan, Bei Yu, Jhih-Rong Gao
2013 IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems  
In this paper, we survey key design for manufacturing issues for extreme scaling with emerging nanolithography technologies, including double/multiple patterning lithography, extreme ultraviolet lithography  ...  Index Terms-Design for manufacturing, double patterning, e-beam lithography (EBL), EUV lithography (EUVL), multiple patterning, nanolithography, physical design.  ...  Puri, IBM, for their helpful discussions.  ... 
doi:10.1109/tcad.2013.2276751 fatcat:amxc565rjfg6bkliymbbbjczde

Homogeneous dewetting on large-scale microdroplet arrays for solution-processed electronics

Xuying Liu, Chuan Liu, Kenji Sakamoto, Takeshi Yasuda, Pan Xiong, Lijuan Liang, Tengzhou Yang, Masayuki Kanehara, Jun Takeya, Takeo Minari
2017 NPG Asia Materials  
Unidirectional dewetting enables the production of large-area thin films with high efficiency at low cost.  ...  Herein, we report homogeneous unidirectional dewetting on large-area microdroplet arrays via gravity-induced deformation in droplets combined with alternating lyophilic/lyophobic patterns.  ...  ACKNOWLEDGEMENTS This work was financially supported by a Grant-In-Aid for Scientific Research  ... 
doi:10.1038/am.2017.123 fatcat:wivvrs6uorgubisbm5ryarjxde
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