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Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design
2015
Proceedings of the 25th edition on Great Lakes Symposium on VLSI - GLSVLSI '15
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Recently directed self-assembly (DSA) has emerged as a promising lithography technique candidate for cut manufacturing because of its ability to form small cylinders inside the guiding templates and the ...
In this paper, we perform a comprehensive study on the DSA cut mask optimization problem. ...
patterning lithography, E-beam lithography, extreme ultra violet (EUV), and directed self-assembly (DSA) [1, 2] . ...
doi:10.1145/2742060.2742114
dblp:conf/glvlsi/OuYGPPL15
fatcat:pvijxekn55arhjnx7rnkpimna4
Directed self-assembly cut mask assignment for unidirectional design
2015
Journal of Micro/Nanolithography
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Recently, directed self-assembly (DSA) has emerged as a promising lithography solution for cut manufacturing. ...
We perform a comprehensive study on the DSA aware mask optimization problem to provide a DSA friendly design on cut layers. ...
MEMS MOEMS
031211-6
Jul-Sep 2015 • Vol. 14(3)
Table 2 2 Comparison with extended directed self-assembly (DSA) guiding templates.Ou et al.: Directed self-assembly cut mask assignment. . . ...
doi:10.1117/1.jmm.14.3.031211
fatcat:s6b3hyyjizdfzmvvwrvi5yhon4
Toward Unidirectional Routing Closure in Advanced Technology Nodes
2017
IPSJ Transactions on System LSI Design Methodology
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However, unidirectional layout style introduces significant impacts on the physical design flow. ...
In advanced technology nodes, unidirectional layout is strongly preferred for high-density metal layers for better manufacturability. ...
Due to the delay of emerging lithography techniques, such as extreme ultraviolet lithography (EUVL), electron-beam lithography (E-beam) and directed self-assembly (DSA), multiple patterning lithography ...
doi:10.2197/ipsjtsldm.10.2
fatcat:my5uqy2kh5ho3lrrfakdy4yuta
Design for manufacturability and reliability in extreme-scaling VLSI
2016
Science China Information Sciences
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Keywords design for manufacturability, design for reliability, VLSI CAD Citation Yu B, Xu X Q, Roy S, et al. Design for manufacturability and reliability in extreme-scaling VLSI. ...
In this paper, we will discuss some key process technology and VLSI design co-optimization issues in nanometer VLSI. ...
Acknowledgements This work was supported in part by US National Science Foundation, Semiconductor Research Corporation, National Natural Science Foundation of China, TOSHIBA, and CUHK Direct Grant for ...
doi:10.1007/s11432-016-5560-6
fatcat:lz5ebjqeprbanbkgxqxjeouip4
Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications
2004
IEEE Journal of Selected Topics in Quantum Electronics
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for rotation and pistoning, respectively. ...
Index Terms-High aspect ratio, microfabrication, micromachining, micromirror, microoptoelectromechanical systems (MOEMS), optical microelectromechanical systems (MEMS), optical phased array, self-alignment ...
Cagdaser for helpful discussions and reading of the manuscript, and K. Castelino and M. Chang for discussions and assistance in closed-loop control measurements. ...
doi:10.1109/jstqe.2004.829205
fatcat:5ba3u4hsd5egfanql6oipz26ui
Pushing multiple patterning in sub-10nm
2015
Proceedings of the 52nd Annual Design Automation Conference on - DAC '15
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In this paper, we provide a comprehensive overview on the state-of-the-art research results for MPL, from synergistic mask synthesis to physical design. ...
Multiple patterning lithography (MPL) poses many new challenges to both mask design and IC physical design. ...
lithography techniques, such as extreme ultraviolet lithography (EUVL), electric beam lithography (EBL), and directed self-assembly (DSA) [6] . ...
doi:10.1145/2744769.2747940
dblp:conf/dac/PanLYXL15
fatcat:bdmcbgmg2rbapcewkitnfn7ydm
Bioinspired Unidirectional Liquid Transport Micro-nano Structures: A Review
2021
Journal of Bionic Engineering
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With newly developed smart materials, various liquid transport regulation strategies are also summarized for the control of transport speed, direction guiding, etc. ...
Finally, we provide new insights and future perspectives of the directional transport materials. ...
Another mold replica-tion is based on the micro-cones array formed by ferrofluid self-assembly [33] . ...
doi:10.1007/s42235-021-0009-z
fatcat:jawp5zfihfffpc472hddaxowca
OpenWorkstation: A modular open-source technology for automated in vitro workflows
2020
HardwareX
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The base setup consists of a pipetting and transport module and is designed to execute basic protocol steps for in vitro research applications, including pipetting operations for liquids and viscous substances ...
We present a Systems Engineering framework for customized module development, guidance for the design and assembly of the presented modules, and operational instructions on the usage of the workstation ...
Acknowledgements The authors acknowledge the members of the Centre in Regenerative Medicine at QUT, in particular, Ross Kent and Jose Malayil for the build revision, and Antonia Horst for her helpful suggestions ...
doi:10.1016/j.ohx.2020.e00152
pmid:35498237
pmcid:PMC9041211
fatcat:hlk6r4iwxzhnrpkmoffhk6tjb4
Pop-up book MEMS
2011
Journal of Micromechanics and Microengineering
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We present a design methodology and manufacturing process for the construction of articulated three-dimensional microstructures with features on the micron to centimeter scale. ...
Pop-up books and other forms of paper engineering inspire designs consisting of one complex part with a single assembly degree of freedom. ...
Acknowledgments The authors thank Dr James Weaver for providing the SEM images. ...
doi:10.1088/0960-1317/21/11/115021
fatcat:zzpkumu4hfdnjgseegzgepwrzm
Chapter 1
[chapter]
2018
Passive Micro-Optical Alignment Methods
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Reasonable efforts have been made to publish reliable data and information, but the author and the publisher cannot assume responsibility for the validity of all materials or for the consequences of their ...
For solder self-alignment, these parameters can be designed for optimum performance. ...
Hybrid integration of optical elements on the silica waveguide and alignment free assembly is used for cost reduction. The packaging design is based on the SMT module. ...
doi:10.1201/9781420027723-5
fatcat:enlpj7g6p5ax5fmfncue2gfmni
Bulk silicon micromachining for MEMS in optical communication systems
2002
Journal of Micromechanics and Microengineering
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The excellent mechanical properties as well as the optical properties and orientation-dependent etching behaviour of crystalline silicon attract attention for reliable optical components based on surface ...
Crystalline silicon has become more and more important for optical MEMS. ...
Acknowledgments We would like to thank Peter Kopka, Sabine Dickhut and Dirk Nüsse for their excellent work on optical MEMS in Dortmund. ...
doi:10.1088/0960-1317/12/4/301
fatcat:4krmm7uq2nc5xbwrbjgofcoghq
Front Matter: Volume 6897
2008
Optoelectronic Integrated Circuits X
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Publication of record for individual papers is online in the SPIE Digital Library. ...
The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. ...
Jürgen Van Erps acknowledges the FWO for financial support. ...
doi:10.1117/12.791604
fatcat:z7oyykjwwben5ca4pesdut3xji
A method for building self-folding machines
2014
Science
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We characterize the behavior of this composite with models and experimental data, and use this information to develop design rules for self-folding. ...
This dissertation demonstrates that self-folding can produce functional machines with a new laminate we refer to as a shape memory composite. ...
based off of the unidirectional composite presented in Section 3.2. ...
doi:10.1126/science.1252610
pmid:25104380
fatcat:vcxrwg4mw5bvbarxowscnnjovy
Design for Manufacturing With Emerging Nanolithography
2013
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
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In this paper, we survey key design for manufacturing issues for extreme scaling with emerging nanolithography technologies, including double/multiple patterning lithography, extreme ultraviolet lithography ...
Index Terms-Design for manufacturing, double patterning, e-beam lithography (EBL), EUV lithography (EUVL), multiple patterning, nanolithography, physical design. ...
Puri, IBM, for their helpful discussions. ...
doi:10.1109/tcad.2013.2276751
fatcat:amxc565rjfg6bkliymbbbjczde
Homogeneous dewetting on large-scale microdroplet arrays for solution-processed electronics
2017
NPG Asia Materials
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Unidirectional dewetting enables the production of large-area thin films with high efficiency at low cost. ...
Herein, we report homogeneous unidirectional dewetting on large-area microdroplet arrays via gravity-induced deformation in droplets combined with alternating lyophilic/lyophobic patterns. ...
ACKNOWLEDGEMENTS This work was financially supported by a Grant-In-Aid for Scientific Research ...
doi:10.1038/am.2017.123
fatcat:wivvrs6uorgubisbm5ryarjxde
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