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Silicon-on-insulator technology for microelectromechanical applications

A. Y. Usenko, New Jersey Microsystems, Inc. 240 King Blvd., Newark, NJ 07102, njm@technologist.com
1999 Semiconductor Physics, Quantum Electronics & Optoelectronics  
Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed.  ...  A purpose of the paper is to give a review of recent development (1998)(1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates.  ...  Accurate thermal simulations of SOI transistors and cantilever MEMS structures are described in [13] where lateral thermal conduction in the silicon device layer is determined by MEMS.  ... 
doi:10.15407/spqeo2.01.093 fatcat:p2ajz2nxybenhgpufbfmhm54ty

Thin film encapsulated 1D thermoelectric detector in an IR microspectrometer

Huaiwen Wu, Arvin Emadi, Ger de Graaf, Reinoud F. Wolffenbuttel, Francis Berghmans, Anna G. Mignani, Chris A. van Hoof
2010 Optical Sensing and Detection  
A thermopile-based detector array for use in a miniaturized Infrared (IR) spectrometer has been designed and fabricated using CMOS compatible MEMS technology.  ...  The combination of the use of CMOS compatible materials and processing with high absorbance in 1.5 -5 μm wavelength range makes a complete on-chip microspectrometer possible.  ...  Rajaraman for their assistance in device fabrication, to J. Wingerden for acquiring the SEM image and to Prof. P. M. Sarro for helpful discussions on the processing.  ... 
doi:10.1117/12.854182 fatcat:w46rphnulrbutgeeghxjg7xm74

Encapsulated thermopile detector array for IR microspectrometer

Huaiwen Wu, Arvin Emadi, Ger de Graaf, Reinoud F. Wolffenbuttel, Mark A. Druy, Christopher D. Brown, Richard A. Crocombe
2010 Next-Generation Spectroscopic Technologies III  
The combination of the use of CMOS compatible materials and processing with high absorbance in 1.5 -5 μm wavelength range makes a complete on-chip microspectrometer possible.  ...  This thermal cross-talk is about 10% in case of a gap spacing of 10 μm between elements.  ...  Rajaraman for their assistance in device fabrication and to Prof. P. M. Sarro for helpful discussions on the processing.  ... 
doi:10.1117/12.849994 fatcat:zjs4jdrtn5bjxojgvf2vhu7pje

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Haotian Liu, Li Zhang, King Li, Ooi Tan
2018 Micromachines  
However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design.  ...  The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors.  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/mi9110557 pmid:30715056 pmcid:PMC6265970 fatcat:vjtrhfyl6bgmrctik3nfgutocy

MEMS-based thermoelectric infrared sensors: A review

Dehui Xu, Yuelin Wang, Bin Xiong, Tie Li
2017 Frontiers of Mechanical Engineering  
The second part discusses the sensing materials, thermal isolation microstructures, absorber designs, and packaging methods for these sensors and provides examples.  ...  In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology.  ...  Acknowledgements This work was supported by the National Natural Science Foundation of China (Grant Nos. 51675516 and 51577186).  ... 
doi:10.1007/s11465-017-0441-2 fatcat:mj7vmejhqzhhljx7v5nvrlk2ce

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Ya-Chu Lee, Ping-Lin Yang, Chun-I Chang, Weileun Fang
2018 Proceedings (MDPI)  
of heater and ZnO-SnO2 gas-sensing films using CMOS-MEMS and drop casting technologies.  ...  This design has three merits: (1) low-cost post-CMOS process using metal/oxide wet etching, (2) composite sensing material based on ZnO-SnO2 coating on the CMOS-MEMS structure, (3) vertical integration  ...  In Figure 1b , the interaction of sensing material and surrounding gases will lead to the variation of electrical conductance for MOS gas sensor.  ... 
doi:10.3390/proceedings2130772 fatcat:x7jdhc7ievhinjsnr72z4qaw3e

Integrated Micro-Electro-Mechanical System Based Micro-Heater for Gas Flow Detection: A Survey

Dr. M G Veena, JSS Science and Technology University
2020 International Journal of Engineering Research and  
Solutions like Micro-heater MEMS can be the suitable solution; though selection of materials for the different layers such as heaters, substrate etc remains a challenge.  ...  Though, the design of a gas senor and MEMS technology often depends on the selection of material and structural constructs, in this survey different literatures and allied materials, efficiency and limitations  ...  The thermal conductivity of this material (10.4) is also almost five times less than Ni, therefore conduction loss is very small for this material and localized heating can be achieved [8] .  ... 
doi:10.17577/ijertv9is090300 fatcat:7fb4twdr75bk3psj4ary3cwy4e

Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure

Cang-Hai Zhang, Yi Yang, Chang-Jian Zhou, Yi Shu, He Tian, Zhe Wang, Qing-Tang Xue, Tian-Ling Ren
2013 Chinese Physics Letters  
mature CMOS and MEMS technology.  ...  The flexible technology proposed is directly applied to the wafer silicon substrate in the last step, providing the potential of high performance flexible wafer-scale devices by direct integration with  ...  of the mainstream CMOS and MEMS technology.  ... 
doi:10.1088/0256-307x/30/7/077701 fatcat:wb676ml73zazndeuuao4iextqm

MEMS-based embedded sensor virtual components for system-on-a-chip (SoC)

M. Afridi, A. Hefner, D. Berning, C. Ellenwood, A. Varma, B. Jacob, S. Semancik
2004 Solid-State Electronics  
The design and implementation of a monolithic micro electro mechanical systems (MEMS)-based gas sensor virtual component is described.  ...  The system architecture supports an array of gas sensor elements. System response time is limited by the sensor and is complex.  ...  Acknowledgements The authors wish to thank Christopher Montgomery for his valuable discussions and device preparation.  ... 
doi:10.1016/j.sse.2004.05.012 fatcat:hgndybsg5jetpd4ndg44s2bnau

Large-area low-temperature ultrananocrystalline diamond (UNCD) films and integration with CMOS devices for monolithically integrated diamond MEMS/NEMS-CMOS systems

A. V. Sumant, O. Auciello, H.-C. Yuan, Z. Ma, R. W. Carpick, D. C. Mancini, Thomas George, M. Saif Islam, Achyut K. Dutta
2009 Micro- and Nanotechnology Sensors, Systems, and Applications  
We have developed a process based on MPCVD to synthesize UNCD films on up to 200 mm in diameter CMOS wafers, which will open new avenues for the fabrication of monolithically integrated CMOS-driven MEMS  ...  Integration of such MEMS/NEMS devices with complementary metal oxide semiconductor (CMOS) microelectronics will provide a unique platform for CMOS-driven commercial MEMS/NEMS.  ...  for the production of a new generation of monolithically integrated diamond MEMS/NEMS/CMOS devices for low power CMOS driven MEMS/NEMS -based systems.  ... 
doi:10.1117/12.822794 fatcat:vq5yuf3jlnfizltippb7jqwhli

A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

Mohd Haris Md Khir, Peng Qu, Hongwei Qu
2011 Sensors  
In the device fabricated using ON Semiconductor 0.5 µm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material.  ...  The device fabrication process consisted of a standard CMOS process for sensor configuration, and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release.  ...  The authors would also like to thank Kai Sun at the Electron Microbeam Analysis Laboratory (EMAL) at the University of Michigan for assistance in SEM imaging of the device.  ... 
doi:10.3390/s110807892 pmid:22164052 pmcid:PMC3231732 fatcat:wufwwplh4zczfpihoavligldw4

Design and characterization of micromachined sensor array integrated with CMOS based optical readout

Refik Burak Erarslan, Ulas Adiyan, Sevil Zeynep Lulec, Selim Olcer, Yuksel Temiz, Yusuf Leblebici, Hamdi Torun, Hakan Urey
2014 Sensors and Actuators A-Physical  
Via holes are defined on ROIC by customized post-processing and MEMS chip is thinned down by a grinding process to enable integrated optical readout.  ...  A CMOS-based readout integrated circuit (ROIC) is integrated to the MEMS chip.  ...  R.B.E acknowledges support from TUBITAK scholarship for graduate studies.  ... 
doi:10.1016/j.sna.2013.10.014 fatcat:hrhlwuhvw5b33esius6dzgsnvm

Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators

Jin Xie, Chengkuo Lee, Ming-Fang Wang, Hanhua Feng
2011 Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics  
compatible processes and materials.  ...  A novel TPG design with thermal legs embedded in top and bottom vacuum cavities is proposed.  ...  For example, Buchwalter et al. developed Bi-CMOS-compatible process for the fabrication of MEMS resonators and filters, wherein the cavity was sealed with PECVD film at 400°C, making the devices possible  ... 
doi:10.1116/1.3556954 fatcat:zuzm5cujgrgetou3v45j2jty5a

A novel CMOS sensor for measuring thermal diffusivity of liquids

Yi-Ting Cheng, Chih-Wei Chang, Ya-Rui Chung, Jui-Hung Chien, Jin-Sun Kuo, Wei-Ting Chen, Ping-Hei Chen
2007 Sensors and Actuators A-Physical  
The CMOS chip consists of a thin film of polysilicon covering a cavity of the substrate.  ...  This study aims at designing and developing a CMOS sensor chip for measuring thermal diffusivity of liquids.  ...  Acknowledgements The authors deeply appreciate Vanguard International Semiconductor Corporation (VIS) for the fabrication, and the NSC MEMS Research Center, Taipei, Taiwan for providing the equipment for  ... 
doi:10.1016/j.sna.2006.08.026 fatcat:rqw6d3rhpzarpjwetaxlu7fgqq

Development of all metal electrothermal actuator and its applications

JiKui (Jack) Luo
2005 Journal of Micro/Nanolithography  
The electrical and mechanical properties of electroplated Ni thin films have been investigated as a function of temperature and plating current density, and the process conditions have been optimized to  ...  The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and metallic devices.  ...  Theoretical Analysis and Simulation Thermal Conduction Model and Material Selection For surface microtechnology or the integration of MEMS devices with CMOS, in-plane motion thermal actuators are preferred  ... 
doi:10.1117/1.1898243 fatcat:v3caatg6pnezxov47unhkrdioq
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