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Micromachined Silicon-Core Substrate-Integrated Waveguides at 220-330 GHz

Aleksandr Krivovitca, Umer Shah, Oleksandr Glubokov, Joachim Oberhammer
2020 IEEE transactions on microwave theory and techniques  
Moreover, geometrical control during fabrication of this type of waveguides is significantly better as compared to micromachined hollow waveguides.  ...  In this article, we present a new technology platform for creating compact and loss-efficient wafer-scale integrated micromachined substrate-integrated waveguides with silicon-core (Si-SIWs) for the 230  ...  The transition pattern contains three interdigital coupled lines arranged between side ground planes of a coplanar waveguide (CPW) with various gaps.  ... 
doi:10.1109/tmtt.2020.3022060 fatcat:ko65ukcv2fcqld5d2jwsmdlnha

Design and optimization of microwave lumped elements filters using mixed circuital-electromagnetic simulations

D. Neculoiu, A.A. Muller, F. Giacomozzi, D. Vasilache, I. Petrini, C. Buiculescu, A. Muller
2008 2008 International Semiconductor Conference  
A very good agreement between measurements and simulations validate the new design approach.  ...  This paper presents the design, fabrication and experimental results of the switchable band-pass lumped elements filters.  ...  The tunable band-pass filter structures are fabricated in coplanar waveguide (CPW) technology. The main steps of the design procedure are as follows [4, 5] : 1.  ... 
doi:10.1109/smicnd.2008.4703338 fatcat:pemb77ugvnesrilupzc6e3chte

An Approach to Ring Resonator Biosensing Assisted by Dielectrophoresis: Design, Simulation and Fabrication

Anders Henriksson, Laura Kasper, Matthias Jäger, Peter Neubauer, Mario Birkholz
2020 Micromachines  
The chip design, including two different electrode configurations, electric field gradient simulations, and the fabrication process flow of a dielectrohoresis-enhanced microring resonator-based sensor,  ...  The combination of extreme miniaturization with a high sensitivity and the potential to be integrated in an array form on a chip has made silicon-based photonic microring resonators a very attractive research  ...  In the following work, we present the design, simulation, and fabrication process of a ring resonator with a biosensing functionality assisted by positive dielectrophoresis.  ... 
doi:10.3390/mi11110954 pmid:33105846 pmcid:PMC7690605 fatcat:eh6iv7in55eo5b2pbb7s7fj4xa

Micromachined membrane filters for microwave and millimeter-wave applications (invited article)

Gabriel M. Rebeiz, Linda P. B. Katehi, Thomas M. Weller, Chen-Yu Chi, Stephen V. Robertson
1997 International Journal of Microwave and Millimeter-Wave Computer-Aided Engineering  
Several state-of-the-art filters have been realized including 15-GHz and 20-GHz bandpass interdigital suspended stripline filters, lowpass and bandpass microshield filters at 30 GHz and 90 GHz, microstrip  ...  Recent developments in micromachining techniques at the University of Michigan have resulted in novel high-performance low-loss filters for microwave and millimeter-wave applications.  ...  Rebeiz and Katehi . It was continued with strong support from the Army Research Office, Electronics Division, the Office of Naval Research.  ... 
doi:10.1002/(sici)1522-6301(199703)7:2<149::aid-mmce1>3.0.co;2-n fatcat:4f5rozn4fjfovfcocwqkyorbrm

Working principle description of the wireless passive EM transduction pressure sensor

M.M. Jatlaoui, F. Chebila, P. Pons, H. Aubert
2011 European Physical Journal : Applied physics  
This completely passive and wireless pressure telemetry micro-sensor has been designed, fabricated and characterized, thereby eliminating the need for contact, signal processing circuits, and power supplies  ...  The development of a new passive wireless pressure sensor, based on an electromagnetic transduction approach, is reported.  ...  The sensor design covers different disciplines such as microwaves, materials, micro-fabrication, and mechanics.  ... 
doi:10.1051/epjap/2011100220 fatcat:psk2xkiaqfacbakco6ooq27uou

Coplanar Waveguide Microwave Sensor for Label-Free Real-Time Glucose Detection

M. Sameer, P. Agarwal
2019 Radioengineering  
In this work, a real-time label-free microwave diagnostic approach using Co-Planar Waveguide (CPW) design has been demonstrated for glucose detection.  ...  Glucose sensor is implemented utilizing low cost multilayer PCB and polymer Poly-Di-Methyl-Siloxane(PDMS) fabrication technology. CPW transmission line is fabricated on FR4 microwave laminate board.  ...  Acknowledgments We would like to acknowledge Department of Science & Technology (DST), Govt. of India to support this work under "DST INSPIRE Faculty Award Research Grant (IFA12-ENG-24)", DST PURSE research  ... 
doi:10.13164/re.2019.0491 fatcat:b6wtfmx5jjh37nanyffaj3fo2i

Review of radio frequency microelectromechanical systems technology

S. Lucyszyn
2004 IEE Proceedings - Science Measurement and Technology  
A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms  ...  An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS  ...  Here, two micromechanical SPB impedance tuners were integrated with coplanar waveguide transmission lines, in a quasi-optical detector circuit operating at 620 GHz.  ... 
doi:10.1049/ip-smt:20040405 fatcat:7betp3scozbezewmiiqlaibcqq

Novel micromachined lumped band pass filter for 5.2GHz WLAN applications

Andrei A. Muller, Dan Neculoiu, Alina Cismaru, Patrik Pons, Robert Plana, Dan Dascalu, Alexandru Muller
2011 AEU - International Journal of Electronics and Communications  
This paper describes the design, manufacturing and experiments of a lumped element band pass filter in a new topology. The design starts from a second order capacitive coupled resonator topology.  ...  Design equations for the new band stop resonance frequency are presented together with the analysis of the correspondence between the band pass and band stop attenuation vs. the quality factor of the shunt  ...  Filter design The band pass filter structures are in coplanar waveguide (CPW) technology. The main steps of the design procedure are presented below.  ... 
doi:10.1016/j.aeue.2011.04.001 fatcat:uygaxiincrgpbja47un6qumscm

Multi-Position RF MEMS Tunable Capacitors Using Laterally Moving Sidewalls of 3-D Micromachined Transmission Lines

Umer Shah, Mikael Sterner, Joachim Oberhammer
2013 IEEE transactions on microwave theory and techniques  
This is an author produced version of a paper published in IEEE transactions on microwave theory and techniques.  ...  The authors also wish to thank Alan Cheshire and Gabriel Roupillard from Applied Materials for the SiO 2 and Si deep etching of some of the prototype devices on a Centura etching platform.  ...  Furthermore, the help of Andreas Fischer, KTH, with wire bonding for measuring the prototypes, and of Kjell Noren, KTH, with the critical point dryer, is highly appreciated.  ... 
doi:10.1109/tmtt.2013.2259499 fatcat:7g7vpvfcxrdgxa4v673puf34w4

Small Antenna Based on MEMS and Metamaterial Properties for Reconfigurable Applications

G. Rosas-Guevara, R. Murphy-Arteaga, W. Moreno
2013 International Journal of Antennas and Propagation  
The antenna is designed using coplanar waveguide (CPW) technology, presenting lower dielectric losses and higher signal integrity.  ...  This paper presents the design of a novel, small coplanar antenna using microelectromechanical systems (MEMS) and metamaterial (MTM) properties.  ...  Special recognition is due to the Nanotechnology Research and Education Center (NREC) at USF for their valuable support during the fabrication of the devices.  ... 
doi:10.1155/2013/498176 fatcat:vwb57obh3jcubfs5lmccceupmu

Application of Composite Right/Left-Handed Metamaterials in Leaky-Wave Antennas [chapter]

Keyhan Hosseini, Zahra Atlasbaf
2017 Modern Antenna Systems  
Also, the benefits of LWAs to design high gain active structures, reflecto-directive systems, wideband duallayer substrate integrated waveguide antennas and conformal antennas are discussed.  ...  These works include the application of electronic control, substrate integrated waveguides, dual band and wideband performance, ferrite loaded waveguides, and split-ring-resonator (SRR)-based MTMs in LWAs  ...  (a) The radiation patterns and frequency scanning of the beam and (b) the fabricated wideband dual-layer SIW LWA [18]. (a). Two interdigital slots are embedded in a single cell.  ... 
doi:10.5772/65643 fatcat:ut37yxhgrndjndadlfeqfotvum

2019 Index IEEE Transactions on Microwave Theory and Techniques Vol. 67

2019 IEEE transactions on microwave theory and techniques  
Banerjee, A., +, TMTT May 2019 2087-2094 Investigation of Fabrication Accuracy and Repeatability of High-Q Sili- con-Micromachined Narrowband Sub-THz Waveguide Filters.  ...  ., TMTT Oct. 2019 4095-4106 Investigation of Fabrication Accuracy and Repeatability of High-Q Silicon-Micromachined Narrowband Sub-THz Waveguide Filters.  ...  Power demand Design of Reconfigurable dB-Linear Variable-Gain Amplifier and Switchable-Order g m -C Filter in 65-nm CMOS Technology. Liu  ... 
doi:10.1109/tmtt.2019.2953035 fatcat:hyq2vngaxrcqlggu7bzcbzdyba

Broadband CMOS Gilbert Down-Converter utilizing a low-loss step-impedance rat-race coupler

Hung-Ju Wei, Chinchun Meng, Sheng-Wen Yu
2009 2009 IEEE MTT-S International Microwave Symposium Digest  
The down-converter has NF of 16 dB and LO-to-RF isolation of better than 35 dB. The mixer core consumes 2.9 mA at V dd =1.8 V.  ...  over a wide operating bandwidth.  ...  CIRCUIT DESIGN Referring to Fig. 1(a) , the phase inverter, twisting the signal (S) and ground (G) paths of coplanar strip-line (CPS) of ratrace coupler, not only takes the place of the 3/4 wavelength  ... 
doi:10.1109/mwsym.2009.5165893 fatcat:2ezyht4hyrfwvfcivkreuyzypa

Advances in High-Resolution Microscale Impedance Sensors

Marco Carminati
2017 Journal of Sensors  
In this tutorial review, a selection of examples is illustrated with the purpose of distilling key indications and guidelines for the design of high-resolution impedance readout circuits and sensors.  ...  of Things), it also presents new challenges for the detection electronics, reaching the zeptoFarad domain.  ...  Emnéus, A. Heiskanen, and C. Caviglia (Denmark Technical University) for microfluidics and cell detection, and with T. Albrecth (Imperial College London) for nanopores are gratefully acknowledged.  ... 
doi:10.1155/2017/7638389 fatcat:l4ltfpipljcxjlyxxseuwd3fui

2020 Index IEEE Transactions on Microwave Theory and Techniques Vol. 68

2020 IEEE transactions on microwave theory and techniques  
and Analysis of a Broadband Schottky Diode Noise Source Up To 325 GHz Based on 55-nm SiGe BiCMOS Technology; 2268-2277 Ghannouchi, F.M., see Chen, L., 2796-2807 Ghannouchi, F.M., see Dhar, S.K., TMTT  ...  of Waveguide Dispersion Using Sparse Grid Stochastic Testing; TMTT July 2020 2485-2494 Gotoh, K., see Wu, I., TMTT Feb. 2020 655-665 Goussetis, G., see 1921-1932 Gramlich, G., see Boes, F., TMTT June  ...  ., +, 5279-5287 Design of mm-Wave Slow-Wave-Coupled Coplanar Waveguides.  ... 
doi:10.1109/tmtt.2021.3049615 fatcat:kik4orti4je4xdsgazdbmdoopy
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