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Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Yuki Shimizu, Hiraku Matsukuma, Wei Gao
2019 Sensors  
In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning.  ...  Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the  ...  The founding sponsors had no role in the design of the study; in the collection, analyses, or interpretation of data; in the writing of the manuscript, and in the decision to publish the results.  ... 
doi:10.3390/s19235289 pmid:31805630 pmcid:PMC6928657 fatcat:ll4r4svhn5dnhokqjoiyxhwmna

A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor

Yuki Shimizu, Ayaka Ishida, Yuki Matsuno, Hiraku Matsukuma, Wei Gao
2019 Nanomanufacturing and Metrology  
A new concept of reading head for a linear encoder, in which graduations on a scale grating are read by using a micro thermal sensor composed of a thin film resistor, is proposed to realize a compact encoder  ...  In addition, basic experiments are carried out to search for the possibility of realizing the proposed concept of the reading head based on the micro thermal sensor.  ...  Acknowledgement This research is supported by Japan Society for the Promotion of Science (JSPS).  ... 
doi:10.1007/s41871-019-00037-3 fatcat:k3nqp62qrbbohnzxpnntqkzpra

2019 Index IEEE Transactions on Instrumentation and Measurement Vol. 68

2019 IEEE Transactions on Instrumentation and Measurement  
Alhoshany, A., +, TIM Feb. 2019 392-401 Design and Implementation of a High-Sensitivity and Compact-Size IFM Receiver.  ...  Realization of Absolute Phase and AC Resistance of Current Shunts by Ratio Measurements.  ...  Image scanners Nonlinear Reconstruction of Multilayer Media in Scanning Microwave Microscopy. Wei, Z., +, TIM Jan. 2019 197-205  ... 
doi:10.1109/tim.2019.2956662 fatcat:kotlu7gwcngrdkelerc5va2hqe

Novel Designs for Application Specific MEMS Pressure Sensors

Giulio Fragiacomo, Kasper Reck, Lasse Lorenzen, Erik Thomsen
2010 Sensors  
In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application.  ...  A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted.  ...  Figure 1 . 1 Artistic view of a touch mode capacitive pressure sensors based on an array of capacitive elements.  ... 
doi:10.3390/s101109541 pmid:22163425 pmcid:PMC3231033 fatcat:yyne5feluzco5c3vkrbec5rdoq

Overview of applications of the sensor technologies for construction machinery

Ying Jiang, Xiangyu He
2020 IEEE Access  
Laser sensors are a kind of high-precision positioning and distance measurement sensor [67] .  ...  The roller is equipped with a GPS satellite signal-receiving sensor and a GPS reference position device at the construction site, which are capable of high-precision positioning.  ... 
doi:10.1109/access.2020.3001968 fatcat:bbttnu5ahvbcdkrxdgf35wqkgy

A combined scanning PTV/LIF technique to simultaneously measure the full velocity gradient tensor and the 3D density field

D Krug, M Holzner, B Lüthi, M Wolf, A Tsinober, W Kinzelbach
2014 Measurement science and technology  
The new method allows for the first time to measure the full velocity gradient tensor and the three-dimensional density field simultaneously in a refractive index matched environment.  ...  As a showcase, the new technique is applied to a gravity current flow and the measured data are validated by imposing various checks.  ...  If it is realized, the very precise integer ambiguity-resolved carrier-phase data would then contribute to the estimation of the receiver's position, thus making (near) real-time precise point positioning  ... 
doi:10.1088/0957-0233/25/6/065301 fatcat:dj5gktj65rb2zbgxkqy6cqcmje

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, Michael Kraft
2020 Sensors  
Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface  ...  This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz.  ...  Such a working principle allows a very high precision since a time measurement is performed rather than direct capacitive transduction. Garcia et al.  ... 
doi:10.3390/s20144054 pmid:32708191 fatcat:rtutnvh5wjf75j3v2y4jpbaqma

A 72 × 60 Angle-Sensitive SPAD Imaging Array for Lens-less FLIM

Changhyuk Lee, Ben Johnson, TaeSung Jung, Alyosha Molnar
2016 Sensors  
An A-SPAD pixel consists of (1) a SPAD to provide precise photon arrival time where a time-resolved operation is utilized to avoid stimulus-induced saturation, and (2) integrated diffraction gratings on  ...  Futhermore, the chip presented herein integrates pixel-level counters to reduce output data-rate and to enable a precise timing control.  ...  We use a time gating method for its simplicity and compactness of circuitry, but introduce a dynamically programmable time shift on the gate, with fine temporal accuracy (∼100 ps), to enable sweeping of  ... 
doi:10.3390/s16091422 pmid:27598170 pmcid:PMC5038700 fatcat:dmqjx2oimjbt5bijvvryie462y

An optical readout system for the drag free control of the LISA spacecraft

R. De Rosa, L. Di Fiore, F. Garufi, A. Grado, A. La Rana, L. Milano
2011 Astroparticle physics  
The relative position between each PM and the SC is measured, in six degrees of freedom, by the so-called inertial sensor (IS).  ...  LISA is designed for the measurement of GWs in a very low frequency band (0.1-100 mHz).  ...  Roscilli and G.Vitiello for their skillful assistance in the design and realization of the experimental set-up.  ... 
doi:10.1016/j.astropartphys.2010.10.014 fatcat:ineycutqnbcwxliieogfpdiwcu

Simultaneous Measurement Method and Error Analysis of Six Degrees of Freedom Motion Errors of a Rotary Axis Based on Polyhedral Prism

Dong Ma, Jiakun Li, Qibo Feng, Qixin He, Yaowen Ding, Jianying Cui
2021 Applied Sciences  
An error-sensitive unit which consists of a polyhedral prism and a planar reflector, is designed to carry out measurement of all six DOF errors, including the angular positioning error, the tilt motion  ...  A novel method is proposed for measuring the six degrees-of-freedom (DOF) geometric motion errors of a rotary axis based on a polyhedral prism.  ...  The contact measurement method, based on capacitive sensors, has the advantages of compact structure and low cost, but its measurement range is small.  ... 
doi:10.3390/app11093960 doaj:08fd6206169b4d978cd9fcde80f218e6 fatcat:rgvtnivrxrbpbmupbo2pmztkva

Toward force detection of a cable-driven micromanipulator for a surgical robot based on disturbance observer

Wenjie Wang, Lingtao Yu, Jing Yang
2017 Mechanical Sciences  
In this study, a new asymmetric cable-driven type of micromanipulator for a surgical robot was designed, and a joint angle estimator (JAE) was designed based on the dynamical model of the single cable-driven  ...  The micromanipulators are compact and to allow appropriate disinfection, it is inappropriate to integrate sensors at the end of the micromanipulator.  ...  We also greatly appreciate the efforts and helpful suggestions of the reviewers and our colleagues. Edited by: Guangbo Hao Reviewed by: three anonymous referees  ... 
doi:10.5194/ms-8-323-2017 fatcat:jiw5g3gk4zce5ke3xrgmnlodhy

State of the Art of Tactile Micro Coordinate Metrology

Rudolf Thalmann, Felix Meli, Alain Küng
2016 Applied Sciences  
Approximately at the same time, NPL has also developed a micro-fabricated probe based on three angled flexible elements with capacitive sensors [9] .  ...  It is based on a glass fiber with a quasi spherical melted end whose position is measured with an opto-electronic system. Tip diameters down to 20 µm can be realized.  ...  Conflicts of Interest: The authors declare no conflict of interest. Abbreviations The following abbreviations are used in this manuscript: CMM Coordinate measuring machine 3D Three dimensional  ... 
doi:10.3390/app6050150 fatcat:5r2zejqv2rg2hbro36hplpzvaa

2020 Index IEEE Transactions on Instrumentation and Measurement Vol. 69

2020 IEEE Transactions on Instrumentation and Measurement  
Meenalochani, M., and Sudha, S., Influence of Received Signal Strength on Prediction of Cluster Head and Number of Rounds; TIM June 2020 3739-3749 Hendeby, G., see Kasebzadeh, P., TIM Aug. 2020 5862  ...  Converter Using All-Digital Nested Delay-Locked Loops With 50-ps Resolution and High Throughput for LiDAR TIM Nov. 2020 9262-9271 Helsen, J., see Huchel, L., TIM July 2020 4145-4153 Hemavathi, N.,  ...  ., +, TIM Oct. 2020 7353-7364 Erratum to "Design and Evaluation of a Fast, High-Resolution Sensor Evaluation Platform Applied to MEMS Position Sensing" [May 18 1014-1027].  ... 
doi:10.1109/tim.2020.3042348 fatcat:a5f4fsqs45fbbetre6zwsg3dly

2021 Index IEEE Transactions on Instrumentation and Measurement Vol. 70

2021 IEEE Transactions on Instrumentation and Measurement  
Article numbers are based on specified topic areas and corresponding codes associated with the publication.  ...  The primary entry includes the coauthors' names, the title of the paper or other item, and its location, specified by the publication abbreviation, year, and article number.  ...  ., +, TIM 2021 1003209 Acceleration measurement A High-Frequency Acceleration Sensor Based on Fiber Grating.  ... 
doi:10.1109/tim.2022.3156705 fatcat:dmqderzenrcopoyipv3v4vh4ry

Table of Contents

2021 IEEE transactions on industrial electronics (1982. Print)  
Zhang 3537 Design and Realization of a Compact High-Precision Capacitive Absolute Angular Position Sensor Based on Time Grating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  ...  Zhang 3079 Noniterative Design of Litz-Wire High-Frequency Gapped-Transformer (Lw-HFGT) for LLC Converters Based on Optimal Core-Geometry Factor Model (OKGM) . . . . . . . . . . . . . . . . . . . . . .  ... 
doi:10.1109/tie.2020.3041128 fatcat:bxls23wvo5h6lbtkbht7kw6pda
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