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Scheduling analysis of time-constrained dual-armed cluster tools

Ja-Hee Kim, Tae-Eog Lee, Hwan-Yong Lee, Doo-Byeong Park
2003 IEEE transactions on semiconductor manufacturing  
Cluster tools, each of which consists of several singlewafer processing chambers and a wafer handling robot, have been increasingly used for diverse wafer fabrication processes.  ...  We address the scheduling problem for such time-constrained dual-armed cluster tools that have diverse wafer flow patterns.  ...  CONCLUSION We have examined a scheduling problem of dual-armed cluster tools with various flow patterns under wafer delay constraints.  ... 
doi:10.1109/tsm.2003.815203 fatcat:jq65hirb6bbhvlw7rbmtt3um74

Virtual Control

Yong-Jae Joo, Tae-Eog Lee
2004 IEEE robotics & automation magazine  
A cluster tool usually has six or eight PMs, a cooler (CL), an aligner (AL), two loadlocks (LLs), and a TM based on a robot  ...  Dong-Hwan Hwang for his work on 3-D graphic modeling of a cluster tool. Keywords Cluster tool, semiconductor manufacturing, control software, virtual model, verification.  ...  Acknowledgments This work was supported in part by Korea Science Foundation's Grant 98-0200-08-01-2 and Jusung Engineering Ltd., Korea. The authors thank Mr.  ... 
doi:10.1109/mra.2004.1337825 fatcat:efilt22ejrgq7np4ja75zhsxlm

Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations

Jie Li, Yan Qiao, Siwei Zhang, Zhiwu Li, Naiqi Wu, Tairan Song
2021 Applied Sciences  
Wafer residency time constraints and chamber cleaning operations make the scheduling problem of cluster tools more challenging.  ...  To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber cleaning operations on cluster tools; this has been widely used in semiconductor manufacturing.  ...  Conflicts of Interest: The authors declare no conflict of interest.  ... 
doi:10.3390/app11199193 fatcat:k2goriblrnf5xp6l6z73m6qrzu

On scheduling a photolithography area containing cluster tools

Sreenath Chalil Madathil, Siddhartha Nambiar, Scott J. Mason, Mary E. Kurz
2018 Computers & industrial engineering  
In this paper, we present a model for optimizing the scheduling of the photolithography process in the presence of both individual and cluster tools.  ...  delays in a wafer fab.  ...  The research can be extended to deal with finding a solution for minimizing other objectives like minimizing the total number of tardy jobs, minimizing maximum lateness, or to extend the research to investigate  ... 
doi:10.1016/j.cie.2018.05.036 fatcat:xtez43lb75ebdk65gn7udqcl34

Using simulation and hybrid sequencing optimization for makespan reduction at a wet tool

Anna Rotondo, John Geraghty, Paul Young
2012 Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)  
When rigid scheduling rules apply to wet tools, the development of Cycle Time (CT) optimization strategies becomes a relevant challenge.  ...  detailed schedules in short computational times.  ...  The model developed by Mauer and Schelasin (1993) is conceived as a flexible model which can be easily adapted to mimic the behavior of any type of integrated tools, such as cluster tools.  ... 
doi:10.1109/wsc.2012.6465086 dblp:conf/wsc/RotondoGY12 fatcat:ssid2dkqnzhghk6y3nv42gtnna

Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting

Jipeng Wang, Hesuan Hu, Chunrong Pan, Liang Li
2021 IEEE Access  
[24] present an adaptive scheduling approach to cluster tools with tight wafer residency time constraints and large processing time variations.  ...  Thus, it requires that the schedule for cluster tools should possess sufficient adaptiveness and robustness [11] - [15] .  ... 
doi:10.1109/access.2021.3069888 fatcat:ops7gpuznna3djmtty6672jnnq

Impact of Parameter Variations on Circuits and Microarchitecture

Osman Unsal, James Tschanz, Keith Bowman, Vivek De, Xavier Vera, Antonio Gonzalez, Oguz Ergin
2006 IEEE Micro  
A significant number of lithography-related variability problems stem from the stepper. The step-and-repeat process exposes each region of the wafer at different times.  ...  These variations are the result of within-wafer processing differences such as resist thickness variation, stepper lens focus aberrations, and uneven doping.  ... 
doi:10.1109/mm.2006.122 fatcat:2qayw5i7nfegrbz7yzsv3caoa4

Test and Design-for-Testability Solutions for 3D Integrated Circuits

Krishnendu Chakrabarty, Mukesh Agrawal, Sergej Deutsch, Brandon Noia, Ran Wang, Fangming Ye
2014 IPSJ Transactions on System LSI Design Methodology  
of probe access for wafers, test access in stacked dies, yield enhancement, and new defects arising from unique processing steps.  ...  of die wrappers, test scheduling, and access to dies and inter-die interconnects; (iii) interconnect testing in interposer-based 2.5D ICs; (iv) fault diagnosis and TSV repair; (v) cost modeling and test-flow  ...  This approach greatly reduces the effect of delay variations in gates and interconnects due to random process variations. The results of this simulation are shown in Fig. 8 .  ... 
doi:10.2197/ipsjtsldm.7.56 fatcat:56jqb2gwcne5flmqg3gt27ttbm

A Review of Data Mining Applications in Semiconductor Manufacturing

Pedro Espadinha-Cruz, Radu Godina, Eduardo M. G. Rodrigues
2021 Processes  
For decades, industrial companies have been collecting and storing high amounts of data with the aim of better controlling and managing their processes.  ...  The size of the semiconductors signifies a high number of units can be produced, which require huge amounts of data in order to be able to control and improve the semiconductor manufacturing process.  ...  the time-to-market for more advanced, innovative, and gradually elaborate designs and processes demands for process tools and wafers to be examined and verified with up-to-date measurement systems and  ... 
doi:10.3390/pr9020305 fatcat:jyxg4mt3gvbahnu3snh4i3rxvm

2020 Index IEEE Transactions on Automation Science and Engineering Vol. 17

2020 IEEE Transactions on Automation Science and Engineering  
., +, TASE Jan. 2020 166-176 Cluster tools Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation.  ...  ., +, TASE July 2020 1237-1249 Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation.  ...  ., +, TASE July 2020 1237 -1249 Comments and Corrections to "Process Mining to Discover Shoppers' Pathways at a Fashion Retail Store Using a WiFi-Base Indoor Positioning System" [Oct 17 1786 [Oct 17  ... 
doi:10.1109/tase.2020.3037603 fatcat:kyt63444lfc45amrjebyjw34qu

Predictive and Reactive Scheduling for a Critical Machine of a Production System

Iwona Paprocka, Wojciech M. Kempa, Cezary Grabowik, Krzysztof Kalinowski
2014 Advanced Materials Research  
Having Mean Time To First Failure, and Mean Time of Repair a disturbance robust predictive schedule is generated using rule: Minimal Impact of Disturbed Operation on the Schedule.  ...  In the paper a production model with failures is presented where successive failure-free times are supposed to have normal distributions and are followed by normally distributed times of repairs.  ...  Acknowledgments The authors would like to acknowledge Cor Hurkens for his valuable comments and Roel Boumen and Maarten van Bree for their help with the case.  ... 
doi:10.4028/www.scientific.net/amr.1036.909 fatcat:3ujweobndjgl7mqotcqrxfyypy

2020 Index IEEE Transactions on Systems, Man, and Cybernetics: Systems Vol. 50

2020 IEEE Transactions on Systems, Man & Cybernetics. Systems  
The primary entry includes the coauthors' names, the title of the paper or other item, and its location, specified by the publication abbreviation, year, month, and inclusive pagination.  ...  The Subject Index contains entries describing the item under all appropriate subject headings, plus the first author's name, the publication abbreviation, month, and year, and inclusive pages.  ...  ., +, TSMC Dec. 2020 5317-5329 Cluster tools Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrica-tion.  ... 
doi:10.1109/tsmc.2021.3054492 fatcat:zartzom6xvdpbbnkcw7xnsbeqy

The life and times of the Savings Method for Vehicle Routing Problems

GK Rand
2009 ORiON  
savings method has played in the investigation of VRPs with additional constraints.  ...  This paper provides the historical background to the development of the savings method and subsequent proposed variations to the basic savings formula and other improvements, and then charts the role the  ...  Pearn et al. (2004) investigated the wafer probing scheduling problem (WPSP), a variation of the parallel-machine scheduling problem, to sequence families of jobs on identical parallel machines with due  ... 
doi:10.5784/25-2-78 fatcat:lsz64ftkajgf3m5hgsrt7r57ci

Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing

Moon Gi Seok, Wentong Cai, Hessam S. Sarjoughian, Daejin Park
2020 IEEE Access  
Typical DE fab models use random variables that follow certain distributions to define model's operation parameters, such as a wafer-processing time of tool models or wafer-lifting (or break) time of operator  ...  A lot's cycle time is the difference between the generation time and the completion time of all steps of wafer processing.  ... 
doi:10.1109/access.2020.3022275 fatcat:k4kooxkm4ze7xjohpo4s6dfb5e

A two-stage coupled algorithm for an integrated maintenance planning and flowshop scheduling problem with deteriorating machines

Maliheh Aramon Bajestani, J. Christopher Beck
2015 Journal of Scheduling  
The integrated approach models the interdependencies between maintenance and scheduling decisions in highly coupled processes such as wafer fabrication in the semiconductor manufacturing.  ...  Deterioration of machines over time decreases production capacity.  ...  In this process, wafer lots (production jobs) flow through the system, requiring several operations to be performed by various cluster tools (machines) (Kumar and Kumar, 2001) .  ... 
doi:10.1007/s10951-015-0416-2 fatcat:ieno2gxpmjg3de7ohvo3nb3rdy
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