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Resolution Enhancement Techniques and Design for Manufacturability: Containing and Accounting for Variabilities in Integrated Circuit Creation

Alfred K. K. Wong
2007 Journal of Micro/Nanolithography  
Annular illumination, for example, was almost synonymous with off-axis illumination ͑OAI͒; lithography models used in optical proximity correction ͑OPC͒ marginally characterized photoresist dissolution  ...  In "True process variation aware optical proximity correction with variational lithography modeling and model calibration," Yu et al. propose an OPC model that considers dose and focus fluctuations.  ... 
doi:10.1117/1.2784723 fatcat:7eh5l65mx5ahjehu3cpdps3jj4

Robust and efficient inverse mask synthesis with basis function representation

Xiaofei Wu, Shiyuan Liu, Wen Lv, Edmund Y. Lam
2014 Optical Society of America. Journal A: Optics, Image Science, and Vision  
To ease the computation of the gradient, we use an adaptive method that divides the optimization into two steps, in which a small number of kernels is used as the first step, and more kernels are used  ...  Mask optimization is essential in the resolution scaling of optical lithography due to its strong ability to overcome the optical proximity effect.  ...  Generally, current mask optimization methods can be categorized as polygon-based optical proximity correction (OPC) and the pixel-based inverse lithography technique (ILT) [4, 5] .  ... 
doi:10.1364/josaa.31.0000b1 pmid:25606774 fatcat:mpxle6v63nahrptlmied5jw66m

Guidestar-free image-guided wavefront shaping

Tomer Yeminy, Ori Katz
2021 Science Advances  
The wavefront correction is found even for objects that are larger than the memory-effect range, by blindly optimizing image quality metrics.  ...  However, these require an implanted guidestar for determining the wavefront correction, controlled coherent illumination, and most often raster scanning of the shaped focus.  ...  Our method is inspired by image-guided adaptive optics (4, (30) (31) (32) , where an image metric is used to find the wavefront correction for aberrations that are composed of several low-order modes.  ... 
doi:10.1126/sciadv.abf5364 pmid:34138733 fatcat:ejhwmu4mffg2bpek5nouvkuxau

Guidestar-free image-guided wavefront-shaping [article]

Tomer Yeminy, Ori Katz
2020 arXiv   pre-print
Most importantly, the wavefront-correction is found even for objects that are larger than the memory-effect range, by blindly optimizing image-quality metrics.  ...  However, these require an implanted guide-star for determining the wavefront correction, controlled coherent illumination, and most often raster scanning of the shaped focus.  ...  Our method is inspired by image-guided adaptive-optics [4] , [30] - [32] , where an image metric is used to find the wavefront correction for aberrations that are composed of several low-order modes  ... 
arXiv:2007.03956v1 fatcat:2lc635rthzfmzoowwt7ytlv7fm

Adaptive aberration correction of GRIN lenses for confocal endomicroscopy

W. M. Lee, S. H. Yun
2011 Optics Letters  
Here we present the diagnosis of the aberrations in GRIN probes and the use of adaptive optics to compensate for the wavefront errors in the endoscope.  ...  In this Letter, we propose the use of adaptive optics to correct the aberrations in GRIN endomicroscopy.  ...  Adaptive aberration correction using deformable mirrors has previously been used in optical microscopy for the correction of sample-induced aberrations [7, 8] .  ... 
doi:10.1364/ol.36.004608 pmid:22139258 pmcid:PMC3461260 fatcat:o5zoylq37ze7ti5wjvo4mzyprq

Half-tone proximity lithography

Torsten Harzendorf, Lorenz Stuerzebecher, Uwe Vogler, Uwe D. Zeitner, Reinhard Voelkel, Hugo Thienpont, Peter Van Daele, Jürgen Mohr, Hans Zappe
2010 Micro-Optics 2010  
We show that a wide range of different micro-optical structures can be optimized by controlling the light diffraction in proximity lithography.  ...  In combination with an adapted lithography mask the formation of a desired intensity distribution in the resist layer is possible.  ...  Maybe the correction of the shape results in assisted aperture features, which will not be resolved, similar to the optical proximity correction of photo masks.  ... 
doi:10.1117/12.854307 fatcat:hjoqoehfofgzxkzjuvjvjb3efa

Large Aperture, Tip Tilt Mirror for Beam Jitter correction in High Power Lasers

Devinder Ghai, Anuya Venkatesh, Het Swami, Anjesh Kumar
2013 Defence Science Journal  
An experimental set-up is described to test the TTM performance in closed loop conditions.  ...  This paper describes a large aperture tip-tilt mirror (TTM) assembly for correction of beam jitter in high power lasers.  ...  An adaptive optical system is, in general, used to correct the localized wavefront errors and the beam drift/ jitter [6] [7] [8] .  ... 
doi:10.14429/dsj.63.5760 fatcat:clepxgsjknbf7ma6r4i3vp5axy

Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks

T. Weichelt, U. Vogler, L. Stuerzebecher, R. Voelkel, U. D. Zeitner
2014 Optics Express  
By using an alternating aperture phase shift photomask (AAPSM), a resolution of 1.5 µm (half-pitch) for non-periodic lines and spaces pattern was demonstrated at 30 µm proximity gap.  ...  The application of the phase-shift method allows a significant resolution enhancement for proximity lithography in mask aligners.  ...  Additional applied optical proximity correction (OPC) structures (scattering bars) as illustrated in Fig. 1c ) can be further used to correct the intensity and hence the width as well as the position  ... 
doi:10.1364/oe.22.016310 pmid:24977882 fatcat:dwpod3ph2vclponlh5au3bzcn4

Adaptive Multiphoton Endomicroscope Incorporating a Polarization-Maintaining Multicore Optical Fibre

Youngchan Kim, Sean C. Warren, James M. Stone, Jonathan C. Knight, Mark A. A. Neil, Carl Paterson, Chris W. Dunsby, Paul M. W. French
2016 IEEE Journal of Selected Topics in Quantum Electronics  
We demonstrate that the SLM can enable dynamic phase correction of path-length variations across the multicore optical fibre whilst the fibre is perturbed with an update rate of 100 Hz.  ...  We show theoretically that the use of a PM multicore fibre in our experimental configuration enhances the fluorescence excitation intensity achieved in the focal spot compared to a non-PM optical fibre  ...  This proximal phase-correction approach is similar in concept to the adaptive optics techniques used for the control of beam propagation through inhomogeneous media that have been studied in the context  ... 
doi:10.1109/jstqe.2015.2488283 fatcat:7suh4xtmvrdm7fvzdpyj6fx3fi

Aberration measurement and correction on a large field of view in fluorescence microscopy [article]

Tommaso Furieri, Daniele Ancora, Gianmaria Calisesi, Stefano Morara, Andrea Bassi, Stefano Bonora
2021 arXiv   pre-print
Wavefront correction can be achieved using a deformable mirror with wavefront sensorless optimization algorithms but, despite the complexity of these systems, the level of correction is often limited to  ...  The aberrations induced by the sample and/or by the sample holder limit the resolution of optical microscopes.  ...  Bonora acknowledges a financial interest in Dynamic Optics srl.  ... 
arXiv:2106.01984v1 fatcat:f4mofva5yzbr3awbelx6z4okbm

Universal and Flexible Optical Aberration Correction Using Deep-Prior Based Deconvolution [article]

Xiu Li, Jinli Suo, Weihang Zhang, Xin Yuan, Qionghai Dai
2021 arXiv   pre-print
aberration correction method.  ...  This poses high constraints on the optical hash or low cost applications.  ...  Overall, we show that non-uniform PSF awareness is a essential factor in solving the optical aberration correction problem using deep learning.  ... 
arXiv:2104.03078v2 fatcat:idwmzxxjkrezhi2h5m3z5rkrta

Adaptive multiphoton endomicroscopy through a dynamically deformed multicore optical fiber using proximal detection

Sean C. Warren, Youngchan Kim, James M. Stone, Claire Mitchell, Jonathan C. Knight, Mark A. A. Neil, Carl Paterson, Paul M. W. French, Chris Dunsby
2016 Optics Express  
Single-shot proximal measurement of the relative optical path lengths of all the cores of the PM-MCF in double pass is achieved using a Mach-Zehnder interferometer read out by a scientific CMOS camera  ...  An experimental validation of this approach is presented that compares the proximally measured deformation-induced lateral shift in focal spot position to an independent distally measured ground truth.  ...  An initial correction procedure does require the use of distal detection optics but, once this initial correction procedure has been performed, imaging and correction for fiber deformation is achieved  ... 
doi:10.1364/oe.24.021474 pmid:27661887 fatcat:5xbiogccrfhrfael6nfd5bxwou

Correction of wavefront distortions by means of thermally adaptive optics

H. Lück, K.-O. Müller, P. Aufmuth, K. Danzmann
2000 Optics Communications  
In contrast to the usual adaptive correction, by means of piezoelectric actuators, a high power laser beam is used to control the thermal expansion of the optical elements.  ...  Initial measurements on aluminium-coated mirrors show the feasibility of this 'thermally adaptive optics' method. q  ...  Experiments and results We present first experiments using thermally adaptive optics showing the feasibility of this method.  ... 
doi:10.1016/s0030-4018(00)00468-5 fatcat:x2iemyc7gvaxhp6rvz52hgmrdm

High-resolution structural and functional deep brain imaging using adaptive optics three-photon microscopy [article]

Lina Streich, Juan Boffi, Ling Wang, Khaleel Alhalaseh, Matteo Barbieri, Ronja Rehm, Senthilkumar Deivasigamani, Cornelius Gross, Amit Agarwal, Robert Prevedel
2021 bioRxiv   pre-print
Here we developed a minimally invasive intravital imaging methodology by combining three-photon excitation, indirect adaptive optics correction, and active electrocardiogram gating to achieve near-diffraction  ...  Yet, tissue scattering, optical aberrations, and motion artifacts degrade the achievable image quality with depth.  ...  We further thank Jacopo Antonello, Jingyu Wang and Martin Booth from Oxford University for sharing the design and software of the calibration interferometer used in this work.  ... 
doi:10.1101/2021.01.12.426323 fatcat:vqeru7itgbcglih6qotnyiap5e

Optical Flow Refinement using Reliable Flow Propagation

Tan Khoa Mai, Michèle Gouiffes, Samia Bouchafa
2017 Proceedings of the 12th International Joint Conference on Computer Vision, Imaging and Computer Graphics Theory and Applications  
Propagation of reliable flow throughout the image is then performed using a specific distance criterion based on color and proximity.  ...  This paper shows how to improve optical flow estimation by considering a neighborhood consensus strategy along with a reliable flow propagation method.  ...  (a), (b): correct estimation of the optical flow and proximity with the constraint line.  ... 
doi:10.5220/0006131704510458 dblp:conf/visapp/MaiGB17 fatcat:p27uikuytvg7nkov26bbryl26q
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