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Surface Acoustic Wave Hydrogen Sensors Based on Nanostructured Pd/WO3 Bilayers

Dana Miu, Ruxandra Birjega, Cristian Viespe
2018 Sensors  
RT sensitivities of 0.12–0.13 Hz/ppm to hydrogen are attained for nanoporous bilayer Pd/WO3 films and of 0.1 Hz/ppm for bilayer films with a nanocolumnar WO3 structure.  ...  WO3 thin films with different morphologies and crystalline structures were obtained for different substrate temperatures and oxygen deposition pressures.  ...  A double-double finger design was used with 50 electrodes pairs and a periodicity of 11 µm.  ... 
doi:10.3390/s18113636 fatcat:hdrftp6mmzfb5lpblzndmlp2va

An optical fiber pressure sensor with ultrathin epoxy film and high sensitivity characteristics based on blowing bubble method

Shubin Zhang, Qi Lei, Jiabin Hu, Yubo Zhao, Haitao Gao, Jian Shen, Chaoyang Li
2021 IEEE Photonics Journal  
Finally, a thin film structure fiber Fabry-Perot fiber pressure sensor is formed. The experimental results show that the thickness of the thin film layer at the end of the FP sensor is only 16 μm.  ...  In this paper, an implementation method of high sensitivity thin film fiber optic pressure sensor based on air blowing method is proposed.  ...  of the glass tube to form a fiber optic F-P pressure sensor with a thin film structure.  ... 
doi:10.1109/jphot.2021.3055872 fatcat:tt4wxgcm4beclpbz7qu6x3dxkm

Preliminary study on piezoresistive and piezoelectric properties of a double-layer soft material for tactile sensing

Dan He, Weiting LIU, Yuan RUAN, Xin FU, Cesare STEFANINI
2015 Medžiagotyra  
This paper describes a double-layer simplified sensor unit with interesting electromechanical properties, which consists of a film made from multiwalled carbon nanotube (MWNT) mixed by polymer composite  ...  and a thin film of polyvinylidene fluoride (PVDF).  ...  The dynamic load is monitored by a standard pressure sensor embedded in the exciter.  ... 
doi:10.5755/j01.ms.21.2.6454 fatcat:rggjbeolpzhwhi4756v5ut7gme

Highly sensitive multi-layer pressure sensor with an active nanostructured layer of an organic molecular metal

V Laukhin, V Lebedev, E Laukhina, C Rovira, J Veciana
2016 IOP Conference Series: Materials Science and Engineering  
This work addresses to the modern technologies that need to be instrumented with lightweight highly sensitive pressure sensors.  ...  The paper presents the development of a new plain flexible thin pressure sensor using a nanostructured layer of the highly sensitive organic piezoresistive metal β-(BEDT-TTF) 2 I 3 as an active component  ...  A key design issue for pressure sensor 2 is the use of two layers of a double sided film tape that characterized with small surface friction.  ... 
doi:10.1088/1757-899x/108/1/012038 fatcat:kntqm4yvk5abhbddxnpxh4xd3y

Surface Acoustic Wave Sensors for Hydrogen and Deuterium Detection

Aurelian Marcu, Cristian Viespe
2017 Sensors  
for the thin-film-based SAW sensors.  ...  The responses of sensors with two different nanowire lengths (300 and 600 nm) were compared with those of sensors with thin films of different thicknesses (ca. 100 and 200 nm) to different concentrations  ...  The sensitivity, defined as the frequency shift in Hz per unit analyte concentration in ppm, was determined from an average sensitivity value for a gas concentration between 0.3 and 2%.  ... 
doi:10.3390/s17061417 pmid:28621749 pmcid:PMC5492305 fatcat:rdp4najdbrgldnslnzgyanscvy

Defect Filling Method of Sensor Encapsulation Based on Micro-Nano Composite Structure with Parylene Coating

Jialin Yao, Wenjiang Qiang, Xingqi Guo, Hanshui Fan, Yushuang Zheng, Yan Xu, Xing Yang
2021 Sensors  
This characteristic has a more significant influence on sensors and actuators with movable parts.  ...  This paper takes the pressure sensor as an example to carry out the corresponding research.  ...  These two layers were thin. Thus, after double-layer encapsulation, the experiment shows that the sensitivity of the sensor only decreased by about 2%.  ... 
doi:10.3390/s21041107 pmid:33562626 fatcat:wsnapkbgzzawfgqnx2ukbb6igi

Design and Experimentation with Sandwich Microstructure for Catalytic Combustion-Type Gas Sensors

Jun-Tao Gu, Yong-De Zhang, Jin-Gang Jiang
2014 Sensors  
Thin-film technology is adopted to manufacture the platinum-film sensitive resistance.  ...  The lines of the Pt thin-film resistance have been observed with an electronic microscope.  ...  Each of the beams of the bridge has a platinum thin-film thermal resistor with the same resistance value.  ... 
doi:10.3390/s140305183 pmid:24625742 pmcid:PMC4003987 fatcat:rwn2i57hura3lhz5m2j7tjcjjq

Tungsten-Based Cost-Effective Gas Sensors for H2S Detection

Didier Fasquelle, Nathalie Verbrugghe, Stéphanie Députier
2021 Chemosensors  
A good sensitivity G/G0 of about 6.6 under H2S 100 ppm was obtained with the best sensor. An interesting dynamic response was observed in particular with a short response time.  ...  Tungsten trioxide thin films were deposited on silicon substrates by non-reactive RF sputtering from a WO3 target at room temperature.  ...  It means that high-sensitive gas sensors can be manufactured with WO3 thin films annealed at 400 °C.  ... 
doi:10.3390/chemosensors9110295 fatcat:3bq6ardusrcmdez2oqjrwzleta

Monolithic integration of capacitive sensors using a double-side CMOS MEMS post process

Chih-Ming Sun, Chuanwei Wang, Ming-Han Tsai, Hsieh-Shen Hsieh, Weileun Fang
2008 Journal of Micromechanics and Microengineering  
Monolithic integration of pressure sensors of different sensing ranges and sensitivities, three-axes accelerometers, and a pressure sensor and accelerometer are demonstrated.  ...  The measurement results of the pressure sensors show sensitivities ranging from 0.14 mV kPa −1 to 7.87 mV kPa −1 .  ...  This study has demonstrated a chip containing five pressure sensors with different sensitivities.  ... 
doi:10.1088/0960-1317/19/1/015023 fatcat:itet6y4rxrhxbjaqg7ondpvaou

A Flexible Pressure Sensor Based on Magnetron Sputtered MoS2

Xing Pang, Qi Zhang, Yiwei Shao, Mingjie Liu, Dongliang Zhang, Yulong Zhao
2021 Sensors  
The results showed that the thin film pressure sensor had good piezoresistive performance and high sensitivity.  ...  A proposed flexible pressure sensor based on an MoS2 film was also successfully used as a wearable pressure sensor to measure plantar pressure and demonstrated good repeatability.  ...  The force was applied to the sensitive unit (MoS2 film) of the flexible pressure sensor through an insulating indenter.  ... 
doi:10.3390/s21041130 pmid:33562892 pmcid:PMC7915288 fatcat:cgb37cvjjfbsfkpbxfupwzucgm

A Flexible Capacitive Pressure Sensor Based on Ionic Liquid

Xiaofeng Yang, Yishou Wang, Xinlin Qing
2018 Sensors  
Compared to the traditional pressure sensor, the developed sensor provides a high sensitivity of up to 178.5 nF/KPa and rapid dynamic responses for pressure measurement.  ...  The innovative sensor contains a filter paper filled with ionic liquid, and coated with two indium tin oxide polyethylene terephthalate (ITO-PET) films on the top and bottom, respectively.  ...  high unit-area capacitance, once in contact with the top ITO-PET film.  ... 
doi:10.3390/s18072395 pmid:30041484 pmcid:PMC6069245 fatcat:6isodinqs5calpeobus3z7kya4

Porphyrin Langmuir-Blodgett Thin Film for Organic Vapor Detection

Rifat Çapan
2019 Journal of Physical Science and Application  
Porphyrin molecule was deposited as an Langmuir-Blodgett thin film onto gold substrates for the study of sensor properties using benzene, toluene, ethyl benzene and xylene.  ...  A high quality and uniform Langmuir monolayer from the water surface can be transferred onto a gold coated substrate with a transfer ratio of over 90%.  ...  The pressure-area (π-A) isotherm graph was determined with the accuracy of 0.1 mN m -1 .  ... 
doi:10.17265/2159-5348/2019.01.002 fatcat:6u3iuapj5zaavfk74ammf23wte

Manufacture of Piezoelectric Sensor Dedicated to Airflow Velocity Detection

Xiaoping WANG, Dengpan WANG, Jing YANG
2013 Sensors & Transducers  
with matching layer.  ...  This paper researches the dedicated piezoelectric sensor for airflow information sensitivity which uses PZT-5A piezoelectric material and rigid polyurethane foam to act as its matching materials.  ...  It keeps both transmitting and receiving characteristics which accords with the design direction of miniaturization and high sensitivity sensor.  ... 
doaj:271bb6a76c01408fad89af4db0721fa8 fatcat:mzdn32iqozcovldvtzmlhwk7xy

Development of contact pressure and shear stresses sensor for touch panel

Renta KASAI, Kazuhiko SASAGAWA, Kazuhiro FUJISAKI, Satoshi SAITO, Hiroshi KOYAMA
2018 Mechanical Engineering Letters  
Thus, a sensor for the contact pressure and shear stress measurements was fabricated in this study, in which a conductive polymer was used as a pressure-sensitive material.  ...  Sensing units were constructed from transparent materials and integrated to be a 4 × 4 array structure.  ...  Conclusion A thin sensor for contact pressure and shear stress measurements was fabricated in this study. Conductive polymer was used as a pressure sensitive material in the sensor.  ... 
doi:10.1299/mel.18-00257 fatcat:yv7etfmelfavbofcncxylw2cry

Highly sensitive piezoresistive sensors based on a voltage divider circuit with TFTs for ultra-low pressure detection

Jiayu Feng, Longlong Chen, Xifeng Li, Jianhua Zhang
2021 IEEE Journal of the Electron Devices Society  
A highly sensitive piezoresistive tactile sensor combined with the thin-film transistors (TFTs) is produced in this letter.  ...  The sensor uses two-dimensional Ti3C2-MXenes as piezoresistive material which is one type of transition metal carbide, nitride and/or carbonitride with a lamellar structure.  ...  A 150-nm-thick molybdenum (Mo) film was grown by sputtering and was patterned as gate Highly sensitive piezoresistive sensors based on a voltage divider circuit with TFTs for ultra-low pressure detection  ... 
doi:10.1109/jeds.2021.3085135 fatcat:4j7c3w65lrh2tdtwpr7i6y4wsi
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