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A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators

Mauricio Pardo, Logan Sorenson, Farrokh Ayazi
2011 2011 IEEE International Symposium of Circuits and Systems (ISCAS)  
This paper presents a new empirical exponential-series-based model that describes the measured phase-noise (PN) of a nonlinear piezoelectric MEMS oscillator.  ...  The average fitting error of the proposed model to a 23 MHz in-plane shear (IPS) mode oscillator is found to be less than 1%.  ...  ACKNOWLEDGMENTS The authors wish to thank the MOSIS Fabrication Service for IC fabrication and Dr. Wanling Pan for device fabrication.  ... 
doi:10.1109/iscas.2011.5937541 dblp:conf/iscas/PardoSA11 fatcat:nhgxsvcw4zgh3nmuk3bha3rw6q

Phase noise shaping via forced nonlinearity in piezoelectrically actuated silicon micromechanical oscillators

M. Pardo, L. Sorenson, W. Pan, F. Ayazi
2011 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems  
This paper shows improved phase-noise performance of MEMS oscillators when the sustaining amplifier operates a lateral bulk acoustic wave AlN-on-Si resonator in the nonlinear regime.  ...  An empirical exponential-series-based model that closely describes the phase noise in nonlinearity is presented, reflecting the increased resonator filter order and the reduced amplifier flicker-noise  ...  It has been shown theoretically that nonlinear operation of a resonator can suppress the flicker noise of the interface circuitry and improve the oscillator phase noise [3] .  ... 
doi:10.1109/memsys.2011.5734541 fatcat:3fe3wiwmwvc45odav4du6qagte

Noise Evasion Properties of Electrostatic Gap-Closing MEMS Resonators with Pulsed Excitation Waveforms

Jerome Juillard, Antonio Somma, Alexis Brenes
2020 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)  
The limits on MEMS resonant sensor performance set by nonlinearity are often studied through a model of a Duffing resonator, with linear actuation.  ...  This model largely fails to capture the properties of MEMS resonant sensors with electrostatic gap-closing actuation.  ...  Framework We consider a simplified model of a MEMS oscillator, consisting of a one-port MEMS resonator with nonlinear mechanical stiffness (e.g. nonlinearity resulting from stressstiffening) and a parallel-plate  ... 
doi:10.1109/ifcs-isaf41089.2020.9234844 fatcat:geingt6o25ddhgafh7z6hqwhcq

Micromachined Resonators: A Review

Reza Abdolvand, Behraad Bahreyni, Joshua Lee, Frederic Nabki
2016 Micromachines  
This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators.  ...  This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material  ...  The Leeson phase noise model is a linear model that gives and expression for the phase noise in an oscillator.  ... 
doi:10.3390/mi7090160 pmid:30404333 pmcid:PMC6190074 fatcat:uugbprrinzblpft6grtuvdob5e

Octave-tunable miniature RF resonators

J.R. White, C.J. White, A.H. Slocum
2005 IEEE Microwave and Wireless Components Letters  
These resonators have been used to stabilize a broadly-tunable oscillator with phase noise of 132 dBc/Hz at 100-kHz offset, with a center frequency tunable from 1.2-2.6 GHz, and a tuning speed of 1 GHz  ...  Index Terms-Microelectromechanical system (MEMS), resonators, voltage controllable oscillators (VCOs).  ...  Ham, Harvard University, for assistance with the microwave testing.  ... 
doi:10.1109/lmwc.2005.859012 fatcat:aura5kvqqzc23dbhw5un3rvcxu

2020 Index Journal of Microelectromechanical Systems Vol. 29

2020 Journal of microelectromechanical systems  
., A Novel MEMS Speaker With Peripheral Electrostatic Actuation; JMEMS Aug. 2020 592-599 Gaspar, J., see Gama, G.R.d.S., JMEMS June 2020 387-396 Gaspar, J., see Garcia, I.S., JMEMS Oct. 2020 734-740  ...  Lozzi, A., +, JMEMS June 2020 306-312 Near-Carrier Phase Noise Suppression at Turnover Temperature in a Thin- Film Piezoelectric-on-Silicon Oscillator.  ...  Miller, J.M.L., +, JMEMS Oct. 2020 677-684 Near-Carrier Phase Noise Suppression at Turnover Temperature in a Thin- Film Piezoelectric-on-Silicon Oscillator.  ... 
doi:10.1109/jmems.2021.3050692 fatcat:5maarkqlwfgclionpbyxqcpmdu

Spontaneous Parametric Down-Conversion Induced by Non-Degenerate Three-Wave Mixing in a Scanning MEMS Micro Mirror

Ulrike Nabholz, Frank Schatz, Jan E. Mehner, Peter Degenfeld-Schonburg
2019 Scientific Reports  
Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS).  ...  For MEMS applications, the geometric structure is typically designed to serve a number of functional requirements.  ...  A scanning micro mirror denotes an example of a resonant MEMS actuator, where one mode of oscillation causes a reflective structure to oscillate and deflect a laser beam [8] [9] [10] [11] [12] [13] [14  ... 
doi:10.1038/s41598-019-40377-0 pmid:30850710 pmcid:PMC6408433 fatcat:zxahwaacizhmfggqxdvc4oypuy

Preface to the special issue "NODYCON 2O19"

Angelo Luongo, Haiyan Hu, Ju H. Park, Steven W. Shaw
2019 Nonlinear dynamics  
Computational nonlinear dynamics a. Analytical methods b. Numerical methods 3. Bifurcation and control a. Bifurcation b. Control 4. New trends in nonlinear dynamics a. MEMS b.  ...  through the A. H. Nayfeh Prizes for the best student papers supported by Springer.  ...  model for chaotic systems; the sixth discusses new algorithms for a class of nonlinear systems in presence of unknown noise.  ... 
doi:10.1007/s11071-019-05428-1 fatcat:xapuq72uinhqhca3q6kbkgfnri

Autoassociative Memory and Pattern Recognition in Micromechanical Oscillator Network

Ankit Kumar, Pritiraj Mohanty
2017 Scientific Reports  
We also thank him for the experimental results demonstrating synchronization in a network of two coupled MEMS oscillators. These results served as the central motivation for the current study.  ...  Acknowledgements We thank Farrukh Mateen and Joseph Boales for helpful discussions. We thank Diego Guerra for collaboration during the early part of the project.  ...  dissipation 14 and using piezoelectric actuation.  ... 
doi:10.1038/s41598-017-00442-y pmid:28341856 pmcid:PMC5428492 fatcat:xh2o7iglqjafjnlq46qs62nlwu

Influence of the Driving Waveform on the Open-Loop Frequency Response of MEMS Resonators With Nonlinear Actuation Schemes

Alexis Brenes, Jerome Juillard, Laurent Bourgois, Filipe Vinci Dos Santos
2016 Journal of microelectromechanical systems  
Our models show that, at large oscillation amplitudes, these responses are strongly dependent on the shape of the actuation waveform, so that the nonlinear frequency response is not the system signature  ...  Influence of the driving waveform on the open-loop frequency response of MEMS resonators with nonlinear actuation schemes.  ...  A. Brenes is with THALES Avionics SAS, 25  ... 
doi:10.1109/jmems.2016.2560260 fatcat:2vzdcnckr5d7xlvhijlkbgo5ni

Phase noise in capacitively coupled micromechanical oscillators

V. Kaajakari, J.K. Koskinen, T. Mattila
2005 IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control  
Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.  ...  Phase noise in capacitively coupled microresonator-based oscillators is investigated.  ...  ., for technical support and Jyrki Kiihamäki for sample fabrication. We acknowledge financing from European Union (Mimosa-FR-6).  ... 
doi:10.1109/tuffc.2005.1563277 fatcat:55z4gbils5crlp4eegb64fh4om

A novel self-sensing technique for tapping-mode atomic force microscopy

Michael G. Ruppert, S. O. Reza Moheimani
2013 Review of Scientific Instruments  
A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing.  ...  Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for atomic force microscopy imaging. © 2013 AIP Publishing LLC  ...  ACTUATOR/SENSOR MODEL OF CANTILEVER The system under consideration is a cantilevered beam with a piezoelectric layer bonded to its surface acting as a self-sensing actuator as shown in Fig. 2(a) .  ... 
doi:10.1063/1.4841855 pmid:24387461 fatcat:3nuecz3yc5gy3jayjt7pi5hmwy

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach

Michael G. Ruppert, Anthony G. Fowler, Mohammad Maroufi, S. O. Reza Moheimani
2017 Journal of microelectromechanical systems  
The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever  ...  Index Terms-Atomic force microscope, piezoelectric selfsensing, electrothermal sensing, electrostatic actuation, microelectromechanical systems (MEMS)  ...  ACKNOWLEDGMENT This research was performed in the Laboratory for Dynamics and Control of Nanosystems (LDCN) at The University of Texas at Dallas, USA.  ... 
doi:10.1109/jmems.2016.2628890 fatcat:opghzcealbbdpgcyu6m3mh4xiy

Partial Gap Transduced MEMS Optoacoustic Oscillator Beyond Gigahertz

Siddharth Tallur, Sunil A. Bhave
2015 Journal of microelectromechanical systems  
We develop a phase noise model for the oscillator and identify the photodetector shot noise to be the dominant noise source.  ...  Electrostatically actuated microelectromechanical system (MEMS) oscillators are limited to few megahertzgigahertz range on account of transduction inefficiency at higher frequencies.  ...  Suresh Sridaran of Avago Technologies for initial fabrication of devices, and Dr. Shantanu Rajwade and Dr.  ... 
doi:10.1109/jmems.2014.2332495 fatcat:356bh7e5izexlcvjfcubqoriie

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Ivana Jokic, Milos Frantlovic, Zoran Djuric, Miroslav Dukic
2015 Facta universitatis - series Electronics and Energetics  
Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will be presented, with a special emphasize on the influence of the resonator AD noise on the oscillator phase noise.  ...  The analysis of noise of RF MEMS/NEMS resonators and oscillators is especially important in modern wireless communication systems due to increasingly stringent requirements regarding the acceptable noise  ...  Gradimir Milovanović, full member of the Serbian Academy of Sciences and Arts, for his contribution in solving mathematical problems.  ... 
doi:10.2298/fuee1503345j fatcat:shrqzcgcrzellaxnqmagmr34ye
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