work_xnosgueytzhjhpmpc6ftboa6ra
Releases
| 2007 |
New Particle Metrology for CMP Slurries
published | article-journal doi:10.1557/proc-0991-c09-01 |
What is a "Work"?
A Fatcat "work" groups a set of releases that are all editings
or editing stages of the same intellectual contribution. For example, a
pre-print and a published article may contain small differences, but still
reference the same underlying "work".