Low resistance n-contact for UVC LEDs by a two-step plasma etching process

by Hyun Kyong Cho, Ji-Hye Kang, Luca Sulmoni, Kevin Kunkel, Jens Rass, Norman Susilo, Tim Wernicke, Sven Einfeldt, Michael Kneissl

Published in Semiconductor Science and Technology by IOP Publishing.

2020

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Date 2020-06-19

DOI 10.1088/1361-6641/ab9ea7

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ISSN-L: 0268-1242

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Low resistance n-contact for UVC LEDs by a two-step plasma etching process release_ytptxcj4qvg4jn42f7jw5fjjny