@article{kim_cho_li_zhu_chin_kwong_2003, title={Lanthanide (Tb)-doped HfO/sub 2/ for high-density MIM capacitors}, volume={24}, DOI={10.1109/led.2003.814024}, publisher={Institute of Electrical and Electronics Engineers (IEEE)}, author={Kim and Cho and Li and Zhu and Chin and Kwong}, year={2003} }