Lanthanide (Tb)-doped HfO/sub 2/ for high-density MIM capacitors

by Sun Jung Kim, Byung Jin Cho, Ming-Fu Li, Chunxiang Zhu, A. Chin, Dim-Lee Kwong

Published in IEEE Electron Device Letters by Institute of Electrical and Electronics Engineers (IEEE).

2003 Volume 24, p442-444

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Year 2003

DOI 10.1109/led.2003.814024

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Lanthanide (Tb)-doped HfO/sub 2/ for high-density MIM capacitors release_y5pa2zjimbdt3kzf5nrcglg3qe