Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials release_rev_b05643a3-1ea3-4664-9bfd-0d5789c65bb5

by Roman Antos, Jaromir Pistora, Jan Mistrik, Tomuo Yamaguchi, Shinji Yamaguchi, Masahiro Horie, Stefan Visnovsky, Yoshichika Otani

Published in Journal of Applied Physics by AIP Publishing.

2006   Volume 100, p054906

Type  article-journal
Stage   published
Year   2006
Language   en ?
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ISSN-L:  0021-8979
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