Characterization and control of a high-Q MEMS inertial sensor using low-cost hardware

by J. A. Gregory, J. Cho, K. Najafi

Released as a paper-conference by IEEE.

2012

Type paper-conference
Stage

unknown

Year 2012

DOI 10.1109/plans.2012.6236886

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Characterization and control of a high-Q MEMS inertial sensor using low-cost hardware release_rev_98850151-0f17-4a78-846c-d1ea66f38f88