Frequency Analysis of Linearly Coupled Modes of MEMS Arrays

by Prashant N. Kambali, Gyanadutta Swain, Ashok Kumar Pandey

Published in Journal of Vibration and Acoustics by ASME International.

2016 Volume 138, p021017

Type article-journal
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published

Date 2016-02-05
Language en ^?

DOI 10.1115/1.4032517

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ISSN-L: 0739-3717

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Frequency Analysis of Linearly Coupled Modes of MEMS Arrays release_rev_679b9ec6-fa54-4d5c-8e39-7df642c32eea