Depth Analysis of Ta/NiFe/Ta/CoFeB/Ta/NiFe Multilayer Thin Films: Comparison of Atom Probe Tomography and Auger Electron Spectroscopy release_pgbc4bmf4nb2nccsgwcgaryaje

by Masaki Kubota, Yoichi Ishida, Katsuaki Yanagiuchi, Hisashi Takamizawa, Yasuko Nozawa, Naoki Ebisawa, Yasuo Shimizu, Takeshi Toyama, Koji Inoue, Yasuyoshi Nagai

Published in Journal of Surface Analysis by Surface Analysis Society of Japan.

2014   Volume 20, p207-210

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