Frequency Analysis of Linearly Coupled Modes of MEMS Arrays

by Prashant N. Kambali, Gyanadutta Swain, Ashok Kumar Pandey

Published in Journal of Vibration and Acoustics by ASME International.

2016 Volume 138, p021017

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Date 2016-02-05
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DOI 10.1115/1.4032517

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ISSN-L: 0739-3717

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Frequency Analysis of Linearly Coupled Modes of MEMS Arrays release_p2gzslmukrfuhjvziku47277he