@inproceedings{bifano_mali_1998, 
  title={MEMS Deformable Mirrors for Adaptive Optics}, 
  DOI={10.31438/trf.hh1998.16}, 
  publisher={Transducer Research Foundation, Inc.}, 
  author={Bifano, T. and Mali, R.K.}, 
  year={1998}, 
  month={Jun}
  }