A Fracture Mechanics Description of Stress-Wave Repair in Stiction-Failed Microcantilevers: Theory and Experiments

by Zayd C. Leseman, Sai B. Koppaka, Thomas J. Mackin

Published in Journal of microelectromechanical systems by Institute of Electrical and Electronics Engineers (IEEE).

2007 Volume 16, p904-911

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Year 2007

DOI 10.1109/jmems.2006.883571

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