Specimen preparation for three-dimensional atom probe using the focused ion-beam lift-out technique

by T. Yamamoto, Y. Hanaoka, N. Mayama, T. Kaito, T. Adachi, M. Nojima, M. Owari

Published in Journal of Surface Analysis by Surface Analysis Society of Japan.

2011 Volume 17, p292-295

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Year 2011
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DOI 10.1384/jsa.17.292

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