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Study on the Preparation Technology of SiNx Thin Film by PECVD
release_lv7wmjobzzhkfnfqrtie4g4eby
by
Huawei Xu,
Zhiyuan He,
Qingli Huang,
Dongxiang Luo,
Jianyao Hu,
Linyong Fan
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by Atlantis Press.
2015
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