@article{稲葉_田中_安部_土門_2011, 
  title={Development of an Wet/Dry Hybrid Deposition to Form ITO}, 
  volume={21}, 
  DOI={10.11486/mes.21.0_69}, 
  number={0}, 
  publisher={The Japan Institute of Electronics Packaging}, 
  author={稲葉, 和久 and 田中, 英樹 and 安部, 真司 and 土門, 孝彰}, 
  year={2011}
  }