@article{sintonen_ali_ylivaara_puurunen_lipsanen_2014, 
  title={X-ray reflectivity characterization of atomic layer deposition Al2O3/TiO2 nanolaminates with ultrathin bilayers}, 
  volume={32}, 
  DOI={10.1116/1.4833556}, 
  publisher={American Vacuum Society}, 
  author={Sintonen and Ali and Ylivaara and Puurunen and Lipsanen}, 
  year={2014}
  }