@article{tsuboi_kakinuma_aoyama_ogawa_hamada_2012, 
  title={Ultrasonic Vibration and Cavitation-aided Micromachining of Hard and Brittle Materials}, 
  DOI={10.1016/j.procir.2012.04.061}, 
  publisher={Elsevier BV}, 
  author={Tsuboi and Kakinuma and Aoyama and Ogawa and Hamada}, 
  year={2012}
  }