@article{kim_moon_kim_yoon_no_2000, 
  title={Simulation of Optical Constants Range of High-Transmittance Attenuated Phase-Shifting Masks Used in KrF Laser and ArF Laser}, 
  volume={39}, 
  DOI={10.1143/jjap.39.6321}, 
  number={Part 1, No. 11}, 
  publisher={Japan Society of Applied Physics}, 
  author={Kim and Moon and Kim and Yoon and No}, 
  year={2000}, 
  month={Nov}
  }