@inbook{feudel_fichtner_strecker_zingg_dallmann_döring_1993, title={Improved Technology Understanding through Using Process Simulation and Measurements}, DOI={10.1007/978-3-7091-6657-4_53}, publisher={Springer Vienna}, author={Feudel and Fichtner and Strecker and Zingg and Dallmann and Döring}, year={1993} }