Rapid Plasma Etching for Fabricating Fused Silica Microchannels release_g4tgw3dtbvfofloelxz63oz5iq

by Kyojiro MORIKAWA, Kazuki MATSUSHITA, Takehiko TSUKAHARA

Published in Analytical Sciences by Japan Society for Analytical Chemistry.

2017   Volume 33, Issue 12, p1453-1456

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Type  article-journal
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Year   2017
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DOI  10.2116/analsci.33.1453
PubMed  29225239
Wikidata  Q47264005
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