Characterization and control of a high-Q MEMS inertial sensor using low-cost hardware

by J. A. Gregory, J. Cho, K. Najafi

Released as a paper-conference by IEEE.

2012

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Year 2012

DOI 10.1109/plans.2012.6236886

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Characterization and control of a high-Q MEMS inertial sensor using low-cost hardware release_fp5co53a5rcsjhh75bu5wmfmze