@inproceedings{quiroga_bensch_aceves_yu_savy_haeckel_lechner_2009, 
  title={Silicon Rich Oxide with controlled mean size of silicon nanocrystals by deposition in multilayers}, 
  DOI={10.1109/ulis.2009.4897607}, 
  publisher={IEEE}, 
  author={Quiroga and Bensch and Aceves and Yu and Savy and Haeckel and Lechner}, 
  year={2009}
  }