@article{malhotra_rek_yalisove_bilello_1996, 
  title={Depth dependence of residual strains in polycrystalline Mo thin films using high‐resolution x‐ray diffraction}, 
  volume={79}, 
  DOI={10.1063/1.361509}, 
  publisher={AIP Publishing}, 
  author={Malhotra and Rek and Yalisove and Bilello}, 
  year={1996}, 
  month={May}
  }