Dual-function circular polarization converter for microwave/plasma processing systems

by T. H. Chang, L. R. Barnett, K. R. Chu, F. Tai, C. L. Hsu

Published in Review of Scientific Instruments by AIP Publishing.

1999 Volume 70, p1530-1534

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Year 1999
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DOI 10.1063/1.1149619

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