@article{yamamoto_shirota_yamamoto_2007, 
  title={XPS Depth Profile Analysis of ArF Immersion Resists by using C<Sub>60</Sub> Ion Beam}, 
  volume={28}, 
  DOI={10.1380/jsssj.28.348}, 
  publisher={Surface Science Society Japan}, 
  author={YAMAMOTO and SHIROTA and YAMAMOTO}, 
  year={2007}
  }