Investigation of SiC Single Crystal Polishing by Combination of Anodic Oxidation and Mechanical Polishing

by Xincheng Yin, School of Mechanical and Precision Instrument Engineering, Xi'an University of Technology, Xi'an 710048, Shaanxi, China.

Published in International Journal of Electrochemical Science by ESG.

2020 p4388-4405

application/pdf 308.0 kB `file_krw3dho6gjbhrjftuznihtuwpq`	www.electrochemsci.org (publisher) web.archive.org (webarchive)
application/pdf 1.9 MB `file_cfmcmeghrrfg5og3y2fmvel2tq`	www.electrochemsci.org (web) web.archive.org (webarchive)

Preserved and Accessible

Type article-journal
Stage

published

Year 2020

DOI 10.20964/2020.05.66

Journal Metadata
Open Access Publication
Not in DOAJ
In ISSN ROAD
Not in Keepers Registry
ISSN-L: 1452-3981

Work Entity
access all versions, variants, and formats of this works (eg, pre-prints)

Cite This

BibTeX
CSL-JSON
MLA
Harvard

Lookup Links

oaDOI/unpaywall (OA fulltext)
Crossref Metadata (via API)
Worldcat
SHERPA/RoMEO (journal policies)
wikidata.org
CORE.ac.uk
Semantic Scholar
Google Scholar

Catalog Record
Revision: c4c1d838-55fb-4282-b6a8-e8ef38c45a35
API URL: JSON

Investigation of SiC Single Crystal Polishing by Combination of Anodic Oxidation and Mechanical Polishing release_c3tyzd5rdjgc7kaaabrntp6p6a