Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

by Roman Antos, Jaromir Pistora, Jan Mistrik, Tomuo Yamaguchi, Shinji Yamaguchi, Masahiro Horie, Stefan Visnovsky, Yoshichika Otani

Published in Journal of Applied Physics by AIP Publishing.

2006 Volume 100, p054906

application/pdf 1.0 MB `file_nx5vgyxyendx3myku2j3mufjxq`
application/pdf 345.7 kB `file_7g3rlagx6bhvdkh7iq34wheszi`	web.archive.org (webarchive) web.archive.org (webarchive) www.riken.jp (web) www.riken.go.jp (web)

Preserved and Accessible

Type article-journal
Stage

published

Year 2006
Language en ^?

DOI 10.1063/1.2337256

Journal Metadata
Not in DOAJ
In Keepers Registry
ISSN-L: 0021-8979

Work Entity
access all versions, variants, and formats of this works (eg, pre-prints)

Cite This

BibTeX
CSL-JSON
MLA
Harvard

Lookup Links

oaDOI/unpaywall (OA fulltext)
Crossref Metadata (via API)
Worldcat
SHERPA/RoMEO (journal policies)
wikidata.org
CORE.ac.uk
Semantic Scholar
Google Scholar

Catalog Record
Revision: b05643a3-1ea3-4664-9bfd-0d5789c65bb5
API URL: JSON

Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials release_buidkkxi3bbcdeg4f43f7abuba