@article{williams_park_remsen_moinpour_2007, 
  title={New Particle Metrology for CMP Slurries}, 
  volume={991}, 
  DOI={10.1557/proc-0991-c09-01}, 
  publisher={Cambridge University Press (CUP)}, 
  author={Williams and Park and Remsen and Moinpour}, 
  year={2007}
  }