@article{oliveira_simoen_agopian_martino_mitard_witters_langer_collaert_thean_claeys_2016, 
  title={Low Temperature Effect on Strained and Relaxed Ge pFinFETs STI Last Processes}, 
  volume={75}, 
  DOI={10.1149/07504.0213ecst}, 
  publisher={The Electrochemical Society}, 
  author={Oliveira and Simoen and Agopian and Martino and Mitard and Witters and Langer and Collaert and Thean and Claeys}, 
  year={2016}, 
  month={Sep}
  }