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Low-cost interference lithography
release_aw2mtdsqvre2zlgfjpx2pdbw3q
by
Corey P. Fucetola,
Hasan Korre,
Karl K. Berggren
Published
in Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
by American Vacuum Society.
2009 Volume 27, p2958
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