Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching

by H HUANG, C KAO, T HSUEH, C YU, C LIN, J CHU, H KUO, S WANG

2004 Volume 113, p125-129

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Date 2004-10-25
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DOI 10.1016/s0921-5107(04)00280-6

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ISSN-L: 0921-5107

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Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching release_7yvy64icabebnk3kptra3d62eq