Effects of Deposition Pressure on the Phase Formation and Electrical Properties of BiFeO3Films Deposited by Sputtering

by Sang-Shik Park

Published in Korean Journal of Materials Research by The Materials Research Society of Korea.

2009 Volume 19, Issue 11, p601-606

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Date 2009-11-27
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DOI 10.3740/mrsk.2009.19.11.601

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ISSN-L: 1225-0562

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Effects of Deposition Pressure on the Phase Formation and Electrical Properties of BiFeO3Films Deposited by Sputtering release_6ywte5t2jnc7jfzh4mrihhwgta