Technology maturity assessment of micro and nano manufacturing processes and process chains release_6ujt7wap35dmfl4qjr52z573le

by Pierre C Vella, Stefan S Dimov, Roussi Minev, Emmanuel B Brousseau

Published in Proceedings of the Institution of mechanical engineers. Part B, journal of engineering manufacture by SAGE Publications.

2017   Volume 232, p1362-1383

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