@article{jipeng_liu_sang_tan_guo_hong_2022, 
  title={Supplementary document for Millimeter-scale ultrathin suspended metasurface integrated high finesse optomechanical cavity - 6031768.pdf}, 
  DOI={10.6084/m9.figshare.21265797.v1}, 
  abstractNote={supplemental 1_document}, 
  publisher={Optica Publishing Group}, 
  author={Jipeng, Xu and Liu, Ken and Sang, You and Tan, Zhongqi and Guo, Chucai and Hong, Zhu}, 
  year={2022}, 
  month={Oct}
  }