@article{friedli_utke_2009, 
  title={Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: simulation and experiment}, 
  volume={42}, 
  DOI={10.1088/0022-3727/42/12/125305}, 
  number={12}, 
  publisher={IOP Publishing}, 
  author={Friedli and Utke}, 
  year={2009}, 
  month={Jun}
  }