releases[] |
{'state': 'active', 'ident': 'buidkkxi3bbcdeg4f43f7abuba', 'revision': 'b05643a3-1ea3-4664-9bfd-0d5789c65bb5', 'redirect': None, 'extra': {'crossref': {'alternative-id': ['10.1063/1.2337256'], 'type': 'journal-article'}}, 'edit_extra': None, 'title': 'Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials', 'subtitle': None, 'original_title': None, 'work_id': 'dxxxdq4kq5crfflh4n4wn472l4', 'container': None, 'files': None, 'filesets': None, 'webcaptures': None, 'container_id': 'cx63fwaifnhdtbqbjlraxrufii', 'release_type': 'article-journal', 'release_stage': 'published', 'release_date': None, 'release_year': 2006, 'withdrawn_status': None, 'withdrawn_date': None, 'withdrawn_year': None, 'ext_ids': {'doi': '10.1063/1.2337256', 'wikidata_qid': None, 'isbn13': None, 'pmid': None, 'pmcid': None, 'core': '8960591', 'arxiv': None, 'jstor': None, 'ark': None, 'mag': None, 'doaj': None, 'dblp': None, 'oai': None, 'hdl': None}, 'volume': '100', 'issue': None, 'pages': '054906', 'number': None, 'version': None, 'publisher': 'AIP Publishing', 'language': 'en', 'license_slug': None, 'contribs': [{'index': 0, 'creator_id': None, 'creator': None, 'raw_name': 'Roman Antos', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': {'seq': 'first'}}, {'index': 1, 'creator_id': None, 'creator': None, 'raw_name': 'Jaromir Pistora', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 2, 'creator_id': None, 'creator': None, 'raw_name': 'Jan Mistrik', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 3, 'creator_id': None, 'creator': None, 'raw_name': 'Tomuo Yamaguchi', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 4, 'creator_id': None, 'creator': None, 'raw_name': 'Shinji Yamaguchi', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 5, 'creator_id': None, 'creator': None, 'raw_name': 'Masahiro Horie', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 6, 'creator_id': None, 'creator': None, 'raw_name': 'Stefan Visnovsky', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}, {'index': 7, 'creator_id': None, 'creator': None, 'raw_name': 'Yoshichika Otani', 'given_name': None, 'surname': None, 'role': 'author', 'raw_affiliation': None, 'extra': None}], 'refs': None, 'abstracts': None}
|