file_7g3rlagx6bhvdkh7iq34wheszi
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2006 |
Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials
published | article-journal doi:10.1063/1.2337256 |
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SHA-256 | 901567ef92b09456ea0f7fcb943ede7cdda29002721d698cb3500c40fd40d71e
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MD5 | 4a6decca0584fc9a95eb180600f40f17
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